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Le, Quoc Toan
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1

Two-level Semi-damascene interconnect with fully self-align..:

, In: 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM),
Marti, Giulio ; Pokhrel, Ankit ; Murdoch, Gayle... - p. 1-3 , 2023
Link: https://doi.org/10.1109/..
 
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2

Wet Cleaning of Ru Semi-Damascene 18 MP Structures:

Güvenc, Haci Osman ; Klipp, Andreas ; Le, Quoc Toan
Solid State Phenomena.  346 (2023)  - p. 331-334 , 2023
Link: https://doi.org/10.4028/..
 
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3

Wet Cleaning/Etching of NiAl Thin Film:

Le, Quoc Toan ; Gül Arslan, Esen ; Fundu, Kevin..
Solid State Phenomena.  346 (2023)  - p. 341-345 , 2023
Link: https://doi.org/10.4028/..
 
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4

A Cleaning Method for Post-Etch Ruthenium Residue Removal U..:

Nakano, Teppei ; Le, Quoc Toan ; Kawarazaki, Hikaru..
Solid State Phenomena.  346 (2023)  - p. 335-340 , 2023
Link: https://doi.org/10.4028/..
 
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5

Barrierless ALD Molybdenum for Buried Power Rail and Via-to..:

, In: 2022 IEEE International Interconnect Technology Conference (IITC),
Gupta, Anshul ; Maes, Jan Willem ; Jourdan, Nicolas... - p. 58-60 , 2022
Link: https://doi.org/10.1109/..
 
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6

MP18–26 Ru Direct-Etch Integration Development with Leakage..:

, In: 2022 IEEE International Interconnect Technology Conference (IITC),
Pokhrel, Ankit ; Marti, Giulio ; O'Toole, Martin... - p. 61-63 , 2022
Link: https://doi.org/10.1109/..
 
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7

Wet Metal Recess Process for Enabling Scaling Boosters:

Akanishi, Yuya ; Kesters, Els ; Le, Quoc Toan..
ECS Transactions.  92 (2019)  2 - p. 255-263 , 2019
Link: https://doi.org/10.1149/..
 
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8

Controlled cobalt recess for advanced interconnect metalliz..:

Pacco, Antoine ; Akanishi, Yuya ; Le, Quoc Toan...
Microelectronic Engineering.  217 (2019)  - p. 111131 , 2019
Link: https://doi.org/10.1016/..
 
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9

Wet-chemical etching of metals for advanced semiconductor t..:

Philipsen, Harold ; Mouwen, Nils ; Teck, Sander...
Electrochimica Acta.  306 (2019)  - p. 285-298 , 2019
Link: https://doi.org/10.1016/..
 
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10

Study of Copper Surface Preparation by Sequential Atomic La..:

Iwasaki, Akihisa ; Akanishi, Yuya ; Mazzamuto, Fulvio...
ECS Transactions.  80 (2017)  2 - p. 233-241 , 2017
Link: https://doi.org/10.1149/..
 
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11

Stuffing-enabled surface confinement of silanes used as sea..:

Sun, Yiting ; Levrau, Elisabeth ; Zhang, Liping...
Microelectronic Engineering.  137 (2015)  - p. 70-74 , 2015
Link: https://doi.org/10.1016/..
 
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12

Development of a Cu and W Compatible PERR Clean in BEOL Adv..:

Kesters, Els ; Le, Quoc Toan ; Decoster, Stefan...
ECS Transactions.  69 (2015)  8 - p. 207-214 , 2015
Link: https://doi.org/10.1149/..
 
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13

Determination of the Model for the Chemical Structure of Po..:

Verdonck, P. ; Le, Quoc Toan ; Devonport, J....
ECS Journal of Solid State Science and Technology.  4 (2014)  1 - p. N3140-N3145 , 2014
Link: https://doi.org/10.1149/..
 
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14

Advanced PECVD SiCOH low-k films with low dielectric consta..:

Verdonck, Patrick ; Wang, Cong ; Le, Quoc Toan...
Microelectronic Engineering.  120 (2014)  - p. 225-229 , 2014
Link: https://doi.org/10.1016/..
 
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15

Integration of Wet Cleaning in 45 Nm Pitch BEOL Processing:

Kesters, Els ; Le, Quoc Toan ; Lazzarino, Frederic...
ECS Transactions.  58 (2013)  6 - p. 135-142 , 2013
Link: https://doi.org/10.1149/..
 
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