Julia D. Lenef (10693171) ; Jaesung Jo (1571974) ; Orlando Trejo (1466356)... https://figshare.com/articles/journal_contribution/Plasma-Enhanced_Atomic_Layer_Deposition_of_p_Type_Copper_Oxide_Semiconductors_with_Tunable_Phase_Oxidation_State_and_Morphology/14478151.
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2021