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Lim, Jong Hyeuk
69
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Online (69)
Mediatypes
Articles (Online) (67)
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english (63)
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?
1
Plasma Characteristics of Internal Inductively Coupled Plas..:
Lim, Jong Hyeuk
;
Kim, Kyong Nam
;
Jeon, Min Hwan
..
Plasma Chemistry and Plasma Processing. 31 (2011) 3 - p. 507-515 , 2011
Link:
https://doi.org/10.1007/..
?
2
Characteristics of hydrogenated silicon thin film deposited..:
Kim, In kyo
;
Lim, Jong Hyeuk
;
Yeom, Geun Young
Vacuum. 86 (2011) 1 - p. 82-86 , 2011
Link:
https://doi.org/10.1016/..
?
3
Characteristics of internal inductively coupled plasma with..:
Lim, Jong Hyeuk
;
Kim, Kyong Nam
;
Gwon, Gwang Ho
...
Journal of Physics D: Applied Physics. 43 (2010) 9 - p. 095202 , 2010
Link:
https://doi.org/10.1088/..
?
4
Characteristics of Internal Inductively Coupled Plasma Sour..:
Lim, Jong Hyeuk
;
Gweon, Gwang Ho
;
Hong, Seung Pyo
...
Japanese Journal of Applied Physics. 49 (2010) 3R - p. 030213 , 2010
Link:
https://doi.org/10.1143/..
?
5
Effect of DC Bias Voltage on the Characteristics of Low Tem..:
Gweon, Gwang Ho
;
Lim, Jong Hyeuk
;
Hong, Seung Pyo
.
Japanese Journal of Applied Physics. 49 (2010) 5R - p. 056505 , 2010
Link:
https://doi.org/10.1143/..
?
6
Investigation of the plasma uniformity in an internal linea..:
Gweon, Gwang Ho
;
Lim, Jong Hyeuk
;
Kim, Kyong Nam
...
Vacuum. 84 (2010) 6 - p. 823-827 , 2010
Link:
https://doi.org/10.1016/..
?
7
Plasma Characteristics of 450 mm Diameter Ferrite-Enhanced ..:
Hong, Seung Pyo
;
Lim, Jong Hyeuk
;
Gweon, Gwang Ho
.
Japanese Journal of Applied Physics. 49 (2010) 8R - p. 080217 , 2010
Link:
https://doi.org/10.1143/..
?
8
Plasma Characteristics of a Ni–Zn Ferrite Enhanced Internal..:
Kim, Kyong Nam
;
Lim, Jong Hyeuk
;
Yeom, Geun Young
Plasma Chemistry and Plasma Processing. 30 (2009) 1 - p. 183-190 , 2009
Link:
https://doi.org/10.1007/..
?
9
Plasma Characteristics of Large Area Inductively Coupled Pl..:
Kim, Kyong Nam
;
Lim, Jong Hyeuk
;
Yeom, Geun Young
Japanese Journal of Applied Physics. 48 (2009) 11 - p. 116006 , 2009
Link:
https://doi.org/10.1143/..
?
10
Effect of Antenna Diameter on the Characteristics of Intern..:
Lim, Jong Hyeuk
;
Kim, Kyong Nam
;
Gweon, Gwang Ho
..
Japanese Journal of Applied Physics. 48 (2009) 9 - p. 096002 , 2009
Link:
https://doi.org/10.1143/..
?
11
Study of Internal Linear Inductively Coupled Plasma Source ..:
Lim, Jong Hyeuk
;
Kim, Kyong Nam
;
Gweon, Gwang Ho
..
Plasma Chemistry and Plasma Processing. 29 (2009) 4 - p. 251-259 , 2009
Link:
https://doi.org/10.1007/..
?
12
Characteristics of Plasma Using a Ferromagnetic Enhanced In..:
Kim, Kyong Nam
;
Lim, Jong Hyeuk
;
Park, Jung Kyun
..
Japanese Journal of Applied Physics. 47 (2008) 9R - p. 7339 , 2008
Link:
https://doi.org/10.1143/..
?
13
Uniformity of internal linear-type inductively coupled plas..:
Lim, Jong Hyeuk
;
Kim, Kyong Nam
;
Park, Jung Kyun
..
Applied Physics Letters. 92 (2008) 5 - p. , 2008
Link:
https://doi.org/10.1063/..
?
14
Scalable internal linear double comb-type inductively coupl..:
Kim, Kyong Nam
;
Lim, Jong Hyeuk
;
Park, Jung Kyun
.
Surface and Coatings Technology. 202 (2008) 22-23 - p. 5242-5245 , 2008
Link:
https://doi.org/10.1016/..
?
15
Line-type inductively coupled plasma source with ferromagne..:
Lim, Jong Hyeuk
;
Kim, Kyong Nam
;
Gweon, Gwang Ho
.
Journal of Physics D: Applied Physics. 42 (2008) 1 - p. 015204 , 2008
Link:
https://doi.org/10.1088/..
1-15