Litta, Eugenio Dentoni
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1

ALD Mo for Advanced MOL Local Interconnects:

, In: 2022 IEEE International Interconnect Technology Conference (IITC),
 
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2

The Low-Frequency Noise Behavior of Advanced Logic and Memo..:

, In: 2022 China Semiconductor Technology International Conference (CSTIC),
 
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3

Barrierless ALD Molybdenum for Buried Power Rail and Via-to..:

, In: 2022 IEEE International Interconnect Technology Conference (IITC),
 
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8

High-Deposition-Rate Atomic Layer Deposition of Thulium Oxi..:

Litta, Eugenio Dentoni ; Hellström, Per-Erik ; Henkel, Christoph...
Journal of The Electrochemical Society.  160 (2013)  11 - p. D538-D542 , 2013
 
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