Search for persons
X
?
2024 Conference of Science and Technology for Integrated Circuits (CSTIC) ,
1
A Study of Flexible BEOL Design Rules Allowing Degreed Slan..:
, In:
?
2024 Conference of Science and Technology for Integrated Circuits (CSTIC) ,
3
A Study on Cross-Level Interconnection of Metal Layers Unde..:
, In:
?
2024 Conference of Science and Technology for Integrated Circuits (CSTIC) ,
5
A Study of the Via Pattern Lithography Process Window Under..:
, In:
?
2023 International Workshop on Advanced Patterning Solutions (IWAPS) ,
6
An Optical Critical Dimension (OCD) Study with Standard Str..:
, In:
?
2023 China Semiconductor Technology International Conference (CSTIC) ,
7
Illumination Optimization for the Beol Dtco with 45 Degree ..:
, In:
?
2023 IEEE 15th International Conference on ASIC (ASICON) ,
8
Improved BEOL Design Rules With 45-Degree Local Interconnec..:
, In:
?
2023 IEEE 15th International Conference on ASIC (ASICON) ,
9
A Further Analysis of the Forbidden Pitch in Photolithograp..:
, In:
?
2023 China Semiconductor Technology International Conference (CSTIC) ,
10
The Analysis of Optical Critical Dimension (OCD) Signal Str..:
, In:
?
2023 China Semiconductor Technology International Conference (CSTIC) ,
11
The Possibility of Using 193 NM Immersion Lithography Proce..:
, In:
?
2022 China Semiconductor Technology International Conference (CSTIC) ,
15