Liu, Xianhe
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1

A Study of Flexible BEOL Design Rules Allowing Degreed Slan..:

, In: 2024 Conference of Science and Technology for Integrated Circuits (CSTIC),
Ren, Zhiwei ; Liu, Xianhe ; Li, Yanli.. - p. 1-4 , 2024
 
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2

High χ P2PFBEMA-b-P2VP Block Copolymers Forming 6–8 nm Doma..:

Wang, Mengge ; Xue, Tao ; Miao, Han...
ACS Applied Materials & Interfaces.  16 (2024)  24 - p. 31586-31596 , 2024
 
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3

A Study on Cross-Level Interconnection of Metal Layers Unde..:

, In: 2024 Conference of Science and Technology for Integrated Circuits (CSTIC),
Li, Ying ; Li, Yanli ; Liu, Xianhe. - p. 1-3 , 2024
 
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4

Electrocatalytic nitrogen reduction to ammonia at low overp..:

Gao, Ya ; Zhu, Meng-Jiao ; Liu, Xian-He...
Chemical Engineering Journal.  493 (2024)  - p. 152659 , 2024
 
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5

A Study of the Via Pattern Lithography Process Window Under..:

, In: 2024 Conference of Science and Technology for Integrated Circuits (CSTIC),
Zhu, Jinhao ; Liu, Xianhe ; Wang, Qi... - p. 1-3 , 2024
 
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6

An Optical Critical Dimension (OCD) Study with Standard Str..:

, In: 2023 International Workshop on Advanced Patterning Solutions (IWAPS),
Wang, Qi ; Liu, Xianhe ; Wu, Qiang. - p. 1-4 , 2023
 
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7

Illumination Optimization for the Beol Dtco with 45 Degree ..:

, In: 2023 China Semiconductor Technology International Conference (CSTIC),
Liu, Xianhe ; Han, Muzi ; Li, Yanli.. - p. 1-3 , 2023
 
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8

Improved BEOL Design Rules With 45-Degree Local Interconnec..:

, In: 2023 IEEE 15th International Conference on ASIC (ASICON),
Liu, Xianhe ; Wu, Qiang ; Li, Yanli. - p. 1-4 , 2023
 
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9

A Further Analysis of the Forbidden Pitch in Photolithograp..:

, In: 2023 IEEE 15th International Conference on ASIC (ASICON),
Li, Yanli ; Liu, Xianhe ; Wang, Qi. - p. 1-4 , 2023
 
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10

The Analysis of Optical Critical Dimension (OCD) Signal Str..:

, In: 2023 China Semiconductor Technology International Conference (CSTIC),
Wang, Qi ; Wu, Qiang ; Liu, Xianhe. - p. 1-3 , 2023
 
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11

The Possibility of Using 193 NM Immersion Lithography Proce..:

, In: 2023 China Semiconductor Technology International Conference (CSTIC),
Wu, Qiang ; Li, Yanli ; Liu, Xianhe. - p. 1-4 , 2023
 
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12

Pressure Prediction Model in Transition Ladle based on Adap..:

Liu, Xianhe ; Tian, Jianyan ; Li, Bo.
Journal of Physics: Conference Series.  2170 (2022)  1 - p. 012009 , 2022
 
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15

Process Window, and Process Optimization in Both Low and Hi..:

, In: 2022 China Semiconductor Technology International Conference (CSTIC),
Li, Yanli ; Wu, Qiang ; Liu, Xianhe.. - p. 1-6 , 2022
 
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