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Luoh, Tuung
18  results:
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1

Carbon Plug Application in 3D NAND Fabrication:

, In: 2022 IEEE International Interconnect Technology Conference (IITC),
Chang, Yu-Chih ; Chen, Liang-Yu ; Chen, Kuang-Wei... - p. 16-18 , 2022
Link: https://doi.org/10.1109/..
 
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2

Tungsten Gate Replacement Process Optimization in 3D NAND M..:

, In: 2019 Joint International Symposium on e-Manufacturing & Design Collaboration(eMDC) & Semiconductor Manufacturing (ISSM),
Luoh, Tuung ; Huang, YuKai ; Chen, Chi-Min... - p. 1-4 , 2019
Link: https://doi.org/10.23919..
 
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3

TiCl4 Barrier Process Engineering in Semiconductor Manufact..:

Luoh, Tuung ; Huang, Yu-Kai ; Hung, Yung-Tai...
Coatings.  6 (2016)  1 - p. 2 , 2016
Link: https://doi.org/10.3390/..
 
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4

Systematic Hot Spots Finding By Pattern Search with Similar..:

Luoh, Tuung ; Lv, Rong ; Chen, Chi-min...
ECS Transactions.  60 (2014)  1 - p. 279-283 , 2014
Link: https://doi.org/10.1149/..
 
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5

Smart Review Sampling Methodology in Huge Inspection Result:

Luoh, Tuung ; Lv, Rong ; Chen, Chi-min...
ECS Transactions.  60 (2014)  1 - p. 881-885 , 2014
Link: https://doi.org/10.1149/..
 
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6

Process Variation Improvement and Stress Analysis of Contac..:

Luoh, Tuung ; Liao, Hsiang-Chou ; Chen, Po-Chou...
ECS Transactions.  44 (2012)  1 - p. 641-646 , 2012
Link: https://doi.org/10.1149/..
 
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7

Advanced Inspection Technique for High Aspect Ratio Contact..:

Liao, Hsiang-Chou ; Hung, Che-Lun ; Luoh, Tuung...
ECS Transactions.  44 (2012)  1 - p. 1207-1212 , 2012
Link: https://doi.org/10.1149/..
 
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8

Process Optimization of Contact Module in NOR Flash Using H..:

Liao, Hsiang C. ; Hung, Che L. ; Luoh, Tuung...
ECS Transactions.  34 (2011)  1 - p. 919-924 , 2011
Link: https://doi.org/10.1149/..
 
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9

Verification of Systematic Defects Using e-Beam Defect Revi..:

Luoh, Tuung ; Yang, Ling-Wu ; Yang, Tahone..
ECS Transactions.  34 (2011)  1 - p. 925-929 , 2011
Link: https://doi.org/10.1149/..
 
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10

Improvement of the properties and electrical performance on..:

Cheng, Ming-Da ; Luoh, Tuung ; Su, Chin-Ta...
Thin Solid Films.  518 (2010)  8 - p. 2285-2289 , 2010
Link: https://doi.org/10.1016/..
 
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11

Advanced tungsten plug process for beyond nanometer technol..:

Luoh, Tuung ; Su, Chin-Ta ; Yang, Ta-Hung..
Microelectronic Engineering.  85 (2008)  8 - p. 1739-1747 , 2008
Link: https://doi.org/10.1016/..
 
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12

Inter-metal inorganic spin-on-glass dielectric layer in 100..:

Cheng, Ming Da ; Luoh, Tuung ; Su, Chin Ta...
Thin Solid Films.  516 (2008)  23 - p. 8726-8730 , 2008
Link: https://doi.org/10.1016/..
 
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13

Dual gate oxide integrity improvement by implementing nitro..:

Luoh, Tuung ; Hsieh, Jung-Yu ; Yang, Ling-Wuu...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  237 (2005)  1-2 - p. 183-187 , 2005
Link: https://doi.org/10.1016/..
 
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14

Thermal stability enhancement of silicides by using N2 and ..:

Luoh, Tuung ; Liou, Maggie ; Liu, Hung-Wei...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  237 (2005)  1-2 - p. 213-216 , 2005
Link: https://doi.org/10.1016/..
 
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15

Observation of Recording Marks in Phase-Change MediaUsing S..:

Luoh, Tuung ; Bow, Jong-Shing ; Peng, Alex..
Japanese Journal of Applied Physics.  38 (1999)  3S - p. 1698 , 1999
Link: https://doi.org/10.1143/..
 
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