MATSUGATANI, Kazuoki
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Silicon nitride and oxide film formation by the simultaneou..:

Takaoka, Gikan H. ; Matsugatani, Kazuoki ; Ishikawa, Junzo.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  37-38 (1989)  - p. 783-786 , 1989
 
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