Maes, Jan Willem
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2

ALD Mo for Advanced MOL Local Interconnects:

, In: 2022 IEEE International Interconnect Technology Conference (IITC),
 
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3

Barrierless ALD Molybdenum for Buried Power Rail and Via-to..:

, In: 2022 IEEE International Interconnect Technology Conference (IITC),
 
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14

Ozone-Based Metal Oxide Atomic Layer Deposition: Impact of ..:

Delabie, Annelies ; Caymax, Matty ; Gielis, Sven...
Electrochemical and Solid-State Letters.  13 (2010)  6 - p. H176 , 2010
 
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