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Malguth, Enno
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1

Fast scatterometric measurement of periodic surface structu..:

Klesse, Wolfgang Matthias ; Rathsfeld, Andreas ; Groß, Claudine...
Measurement.  170 (2021)  - p. 108721 , 2021
Link: https://doi.org/10.1016/..
 
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2

ALPHA - Auf Lichtstreuung basierte Prozessregelung für die.. 

Abschlussbericht für das Verbundprojekt ; Titel des Teilpr... 
Malguth, Enno ; Kruse, Yvonne - Version 1.0 . , 2014
Link: http://edok01.tib.uni-ha..
 
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3

Structural investigations of silicon nanostructures grown b..:

Roczen, Maurizio ; Schade, Martin ; Malguth, Enno...
Applied Physics A.  108 (2012)  3 - p. 719-726 , 2012
Link: https://doi.org/10.1007/..
 
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4

Structural properties of Si/SiO2nanostructures grown by dec..:

Roczen, Maurizio ; Laades, Abdelazize ; Schade, Martin...
physica status solidi (a).  210 (2012)  4 - p. 676-681 , 2012
Link: https://doi.org/10.1002/..
 
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5

Comparison of growth methods for Si/SiO2 nanostructures as ..:

Roczen, Maurizio ; Malguth, Enno ; Schade, Martin...
Journal of Non-Crystalline Solids.  358 (2012)  17 - p. 2253-2256 , 2012
Link: https://doi.org/10.1016/..
 
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6

Electrical and magnetic properties of Ga1−xGdxN grown by me..:

Gupta, Shalini ; Zaidi, Tahir ; Melton, Andrew...
Journal of Applied Physics.  110 (2011)  8 - p. , 2011
Link: https://doi.org/10.1063/..
 
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7

Development of ultra-thin tunneling oxides and Si/SiO2 nano..:

Malguth, Enno ; Roczen, Maurizio ; Gref, Orman..
physica status solidi (a).  208 (2010)  3 - p. 612-615 , 2010
Link: https://doi.org/10.1002/..
 
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8

Fe in III–V and II–VI semiconductors:

Malguth, Enno ; Hoffmann, Axel ; Phillips, Matthew R.
physica status solidi (b).  245 (2008)  3 - p. 455-480 , 2008
Link: https://doi.org/10.1002/..
 
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9

Lithium related deep and shallow acceptors in Li-doped ZnO ..:

Rauch, Christian ; Gehlhoff, Wolfgang ; Wagner, Markus R...
1089-7550.  , 2020
Link: https://depositonce.tu-b..
 
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10

Fast scatterometric measurement of periodic surface structu..:

Klesse, Wolfgang Matthias ; Rathsfeld, Andreas ; Groß, Claudine...
https://doi.org/10.20347/WIAS.PREPRINT.2564.  , 2018
Link: https://doi.org/10.20347..
 
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11

Fast scatterometric measurement of periodic surface structu..:

Klesse, Wolfgang Matthias ; Rathsfeld, Andreas ; Groß, Claudine...
DOI:https://doi.org/10.20347/WIAS.PREPRINT.2564.  , 2018
Link: https://oa.tib.eu/renate..
 
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