E-LIB Suche - Ergebnisse für: Marcel Melzer

1

High precision electrostatic MEMS actuators for in-plane Fa..:

, In: 2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE),

Shaporin, Alexey ; Wecker, Julia ; Runge, Juliane... - p. 1-5 , 2024

Link: https://doi.org/10.1109/..

2

Plastic Waste Recycling─A Chemical Recycling Perspective:

Schade, Alexander ; Melzer, Marcel ; Zimmermann, Sven...
ACS Sustainable Chemistry & Engineering. , 2024

Link: https://doi.org/10.1021/..

3

Optimal design of piezoelectric MEMS for vibration monitori..:

, In: 2023 24th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE),

Shaporin, Alexey ; Stockel, Chris ; Melzer, Marcel... - p. 1-5 , 2023

Link: https://doi.org/10.1109/..

4

Measuring Ion Energy Distributions by Retarding Field Energ..:

, In: 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM),

Dittmar, Nils ; Berger, Birk ; Melzer, Marcel... - p. 1-3 , 2023

Link: https://doi.org/10.1109/..

5

Static High Voltage Actuation of Piezoelectric AlN and AlSc..:

Stoeckel, Chris ; Meinel, Katja ; Melzer, Marcel...
Micromachines. 13 (2022) 4 - p. 625 , 2022

Link: https://doi.org/10.3390/..

6

2D Scanning Micromirror with Large Scan Angle and Monolithi..:

Meinel, Katja ; Melzer, Marcel ; Stoeckel, Chris...
Sensors. 20 (2020) 22 - p. 6599 , 2020

Link: https://doi.org/10.3390/..

7

Ruthenium(II) MOCVD Precursors for Phosphorus‐Doped Rutheni..:

Preuß, Andrea ; Tamuliene, Jelena ; Madajska, Katarzyna...
European Journal of Inorganic Chemistry. 2020 (2020) 17 - p. 1612-1623 , 2020

Link: https://doi.org/10.1002/..

8

Piezoelectric scanning micromirror with built-in sensors ba..:

, In: 2019 IEEE SENSORS,

Meinel, Katja ; Stoeckel, Chris ; Melzer, Marcel... - p. 1-4 , 2019

Link: https://doi.org/10.1109/..

9

Low-temperature chemical vapor deposition of cobalt oxide t..:

Melzer, Marcel ; Nichenametla, Charan K. ; Georgi, Colin..
RSC Adv.. 7 (2017) 79 - p. 50269-50278 , 2017

Link: https://doi.org/10.1039/..

10

Chemical vapor deposition of ruthenium-based layers by a si..:

Jeschke, Janine ; Möckel, Stefan ; Korb, Marcus...
Journal of Materials Chemistry C. 4 (2016) 12 - p. 2319-2328 , 2016

Link: https://doi.org/10.1039/..

11

Copper oxide atomic layer deposition on thermally pretreate..:

Melzer, Marcel ; Waechtler, Thomas ; Müller, Steve...
Microelectronic Engineering. 107 (2013) - p. 223-228 , 2013

Link: https://doi.org/10.1016/..

12

Static High Voltage Actuation of Piezoelectric AlN and AlSc..:

Chris Stoeckel ; Katja Meinel ; Marcel Melzer...
D:Materials and Processing. , 2022

Link: https://doi.org/10.3390/..

13

Static High Voltage Actuation of Piezoelectric AlN and AlSc..:

Chris Stoeckel ; Katja Meinel ; Marcel Melzer...
https://www.mdpi.com/2072-666X/13/4/625. , 2022

Link: https://doi.org/10.3390/..

14

2D Scanning Micromirror with Large Scan Angle and Monolithi..:

Katja Meinel ; Marcel Melzer ; Chris Stoeckel...
https://www.mdpi.com/1424-8220/20/22/6599. , 2020

Link: https://doi.org/10.3390/..

15

On the relationship between SiF4 plasma species and sample ..:

Micha Haase ; Marcel Melzer ; Norbert Lang...
http://dx.doi.org/10.1063/1.5125498. , 2020

Link: https://doi.org/10.1063/..