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2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) ,
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Integrating 8nm Self-Aligned Tip-to-Tip to Enable 4-track S..:
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2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) ,
2
Improving uniformity of 3-level High Aspect Ratio Supervias:
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2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) ,
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Scaled FinFETs Connected by Using Both Wafer Sides for Rout..:
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2020 IEEE International Electron Devices Meeting (IEDM) ,
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