Mattelaer, Felix
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1

Surface reactions between LiHMDS, TMA and TMP leading to de..:

Werbrouck, Andreas ; Mattelaer, Felix ; Dhara, Arpan...
Journal of Materials Chemistry A.  10 (2022)  7 - p. 3543-3551 , 2022
 
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3

Reaction Pathways for Atomic Layer Deposition with Lithium ..:

Werbrouck, Andreas ; Mattelaer, Felix ; Minjauw, Matthias...
The Journal of Physical Chemistry C.  124 (2020)  50 - p. 27829-27839 , 2020
 
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5

A Secondary Reaction Pathway for the Alumina Atomic Layer D..:

Werbrouck, Andreas ; Shirazi, Mahdi ; Mattelaer, Felix...
The Journal of Physical Chemistry C.  124 (2020)  48 - p. 26443-26454 , 2020
 
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8

Atomic Layer Deposition of Nitrogen-Doped Al Phosphate Coat..:

Henderick, Lowie ; Hamed, Hamid ; Mattelaer, Felix...
ACS Applied Materials & Interfaces.  12 (2020)  23 - p. 25949-25960 , 2020
 
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12

Thermal and Plasma-Enhanced Atomic Layer Deposition of Yttr..:

Zhao, Bo ; Mattelaer, Felix ; Rampelberg, Geert..
ACS Applied Materials & Interfaces.  12 (2019)  2 - p. 3179-3187 , 2019
 
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14

Atomic Layer Deposition of Al2O3 Using Aluminum Triisopropo..:

Tai, Truong Ba ; Cao, LiAo ; Mattelaer, Felix...
The Journal of Physical Chemistry C.  123 (2018)  1 - p. 485-494 , 2018
 
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