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2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ,
1
Automated CMP multi-slurry ratio tuning for Defect Reductio..:
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2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ,
2
Innovative Approaches for RG 3D NAND CMP Buff Steps Elimina..:
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2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ,
3
Root Cause Identification and Mitigation of Polysilicon CMP..:
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2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ,
4
Multiphased Process Optimization for CMP Variation Reductio..:
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2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ,
5
NOR yield enhancement and downstream process variation redu..:
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2022 IEEE International Solid- State Circuits Conference (ISSCC) ,
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