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Mcleod, Aaron J.
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1

Achieving a High Thermally Conductive One Micron AlN Deposi..:

Lee, Ping-Che ; McLeod, Aaron J. ; Choi, Mingeun...
ACS Applied Materials & Interfaces.  16 (2024)  20 - p. 26664-26673 , 2024
Link: https://doi.org/10.1021/..
 
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2

High Thermally Conductive, High-Speed Deposition of AlN by ..:

, In: 2024 International VLSI Symposium on Technology, Systems and Applications (VLSI TSA),
Lee, Ping-Che ; McLeod, Aaron J. ; Choi, Mingeun... - p. 1-2 , 2024
Link: https://doi.org/10.1109/..
 
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3

Gallium phosphide conformal film growth on in-situ tri-TBP ..:

Yun, SeongUk ; Lee, Ping-Che ; Kuo, Cheng-Hsuan...
Vacuum.  220 (2024)  - p. 112806 , 2024
Link: https://doi.org/10.1016/..
 
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4

Low-Resistivity Titanium Nitride Thin Films Fabricated by A..:

Kuo, Cheng-Hsuan ; Mcleod, Aaron J. ; Lee, Ping-Che...
ACS Applied Electronic Materials.  5 (2023)  8 - p. 4094-4102 , 2023
Link: https://doi.org/10.1021/..
 
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5

High Thermal Conductivity of Submicrometer Aluminum Nitride..:

Perez, Christopher ; McLeod, Aaron J. ; Chen, Michelle E....
ACS Nano.  , 2023
Link: https://doi.org/10.1021/..
 
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6

Pulsed chemical vapor deposition for crystalline aluminum n..:

McLeod, Aaron J. ; Ueda, Scott T. ; Lee, Ping C....
Thin Solid Films.  768 (2023)  - p. 139717 , 2023
Link: https://doi.org/10.1016/..
 
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7

Plasma enhanced atomic layer deposition of crystallized gal..:

Yun, SeongUk ; Kuo, Cheng-Hsuan ; Lee, Ping-Che...
Applied Surface Science.  619 (2023)  - p. 156727 , 2023
Link: https://doi.org/10.1016/..
 
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8

Atomic layer annealing with radio-frequency substrate bias ..:

McLeod, Aaron J. ; Lee, Ping C. ; Ueda, Scott T....
MRS Bulletin.  48 (2023)  11 - p. 1164-1171 , 2023
Link: https://doi.org/10.1557/..
 
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9

Experimental and theoretical determination of the role of i..:

Ueda, Scott T. ; McLeod, Aaron ; Jo, Youhwan...
Journal of Materials Chemistry C.  10 (2022)  14 - p. 5707-5715 , 2022
Link: https://doi.org/10.1039/..
 
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10

Low Resistivity Titanium Nitride Thin Film Fabricated by At..:

, In: 2022 IEEE International Interconnect Technology Conference (IITC),
Kuo, Cheng-Hsuan ; Mcleod, Aaron J ; Huang, James... - p. 76-78 , 2022
Link: https://doi.org/10.1109/..
 
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11

Crystalline Gallium Nitride Deposition by RF-Biased Atomic ..:

, In: 2022 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA),
McLeod, Aaron J. ; Ueda, Scott T. ; Spiegelman, Jeff. - p. 1-2 , 2022
Link: https://doi.org/10.1109/..
 
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12

The Modulation of Electrokinetic Streaming Potentials of Si..:

Cheng, Li ; Fan, Bei ; Zhang, Zichen...
Langmuir.  38 (2022)  39 - p. 11837-11844 , 2022
Link: https://doi.org/10.1021/..
 
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13

Tris(dimethylamido)aluminum(III) and N2H4: Ideal precursors..:

Ueda, Scott T. ; McLeod, Aaron ; Alvarez, Dan...
Applied Surface Science.  554 (2021)  - p. 149656 , 2021
Link: https://doi.org/10.1016/..
 
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14

Deposition of High Thermal Conductivity AlN Heat Spreader F..:

, In: 2020 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA),
Ueda, Scott T. ; McLeod, Aaron ; Chen, Michelle... - p. 110-111 , 2020
Link: https://doi.org/10.1109/..
 
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15

Plasmon Heating Promotes Ligand Reorganization on Single Go..:

Cheng, Xiaoyu ; Anthony, Taryn P. ; West, Claire A....
The Journal of Physical Chemistry Letters.  10 (2019)  6 - p. 1394-1401 , 2019
Link: https://doi.org/10.1021/..
 
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