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Minegishi, Shinya
33  results:
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1

Perpendicular Orientation Control without Interfacial Treat..:

Nakatani, Ryuichi ; Takano, Hiroki ; Chandra, Alvin...
ACS Applied Materials & Interfaces.  9 (2017)  37 - p. 31266-31278 , 2017
Link: https://doi.org/10.1021/..
 
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2

Precise Synthesis of Fluorine-containing Block Copolymers v..:

Nakatani, Ryuichi ; Takano, Hiroki ; Wang, Lei...
Journal of Photopolymer Science and Technology.  29 (2016)  5 - p. 705-708 , 2016
Link: https://doi.org/10.2494/..
 
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3

The Photopolymer Science and Technology Award:

Takano, Hiroki ; Wang, Lei ; Tanaka, Yuki...
Journal of Photopolymer Science and Technology.  29 (2016)  1 - p. 11-15 , 2016
Link: https://doi.org/10.2494/..
 
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4

Characterization of half-pitch 15-nm metal wire circuit fab..:

Kasahara, Yusuke ; Seino, Yuriko ; Sato, Hironobu...
Microelectronic Engineering.  159 (2016)  - p. 21-26 , 2016
Link: https://doi.org/10.1016/..
 
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5

Fabrication of Sub-10 nm Metal Wire Circuits using Directed..:

Azuma, Tsukasa ; Seino, Yuriko ; Sato, Hironobu...
Journal of Photopolymer Science and Technology.  29 (2016)  5 - p. 647-652 , 2016
Link: https://doi.org/10.2494/..
 
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6

Recent Progress in EUV Resist Outgas Research at EIDEC:

Shiobara, Eishi ; Takagi, Isamu ; Kikuchi, Yukiko...
Journal of Photopolymer Science and Technology.  28 (2015)  1 - p. 103-110 , 2015
Link: https://doi.org/10.2494/..
 
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7

A Challenge to the Micro-phase Separation Limit of PS-b-PMM..:

Kawamonzen, Yoshiaki ; Kihara, Naoko ; Seino, Yuriko...
Journal of Photopolymer Science and Technology.  28 (2015)  5 - p. 617-622 , 2015
Link: https://doi.org/10.2494/..
 
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8

A novel simple sub-15nm line-and-space patterning process f..:

Seino, Yuriko ; Kasahara, Yusuke ; Sato, Hironobu...
Microelectronic Engineering.  134 (2015)  - p. 27-32 , 2015
Link: https://doi.org/10.1016/..
 
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9

A Simulation Study on Defectivity in Directed Self-assembly..:

Kodera, Katsuyoshi ; Kanai, Hideki ; Sato, Hironobu...
Journal of Photopolymer Science and Technology.  28 (2015)  5 - p. 683-688 , 2015
Link: https://doi.org/10.2494/..
 
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10

Vertical Oriented Lamellar Formation of Fluorine- and Silic..:

Takano, Hiroki ; Wang, Lei ; Tanaka, Yuki...
Journal of Photopolymer Science and Technology.  28 (2015)  5 - p. 649-652 , 2015
Link: https://doi.org/10.2494/..
 
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11

Process Evaluation of Directed Self-assembly Lithography us..:

Kodera, Katsuyoshi ; Kanai, Hideki ; Sato, Hironobu...
Journal of Photopolymer Science and Technology.  27 (2014)  1 - p. 31-36 , 2014
Link: https://doi.org/10.2494/..
 
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12

Self-Consistent Field Theory of Directed Self-Assembly on C..:

Tominaga, Tetsuo ; Minegishi, Shinya ; Komatsu, Hiroyuki...
Journal of Photopolymer Science and Technology.  27 (2014)  1 - p. 49-52 , 2014
Link: https://doi.org/10.2494/..
 
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13

Development of Directed Self-Assembly Materials for Sub 10 ..:

Komatsu, Hiroyuki ; Hori, Masafumi ; Minegishi, Shinya..
Journal of Photopolymer Science and Technology.  27 (2014)  4 - p. 425-429 , 2014
Link: https://doi.org/10.2494/..
 
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14

Directed Self Assembly Materials for Semiconductor Lithogra..:

Minegishi, Shinya ; Naruoka, Takehiko ; Nagai, Tomoki
Journal of Photopolymer Science and Technology.  26 (2013)  6 - p. 793-800 , 2013
Link: https://doi.org/10.2494/..
 
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15

Directed Self Assembly Material Development for Fine Patter..:

Minegishi, Shinya ; Namie, Yuji ; Izumi, Kenichi...
Journal of Photopolymer Science and Technology.  26 (2013)  1 - p. 27-30 , 2013
Link: https://doi.org/10.2494/..
 
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