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Moriya, Tsuyoshi
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1

Systematic Search for Stabilizing Dopants in ZrO₂ and HfO₂ ..:

Harashima, Yosuke ; Koga, Hiroaki ; Ni, Zeyuan...
IEEE Transactions on Semiconductor Manufacturing.  36 (2023)  4 - p. 543-546 , 2023
Link: https://doi.org/10.1109/..
 
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2

Guest Editorial Special section on the 2022 International S..:

Moriya, Tsuyoshi
IEEE Transactions on Semiconductor Manufacturing.  36 (2023)  4 - p. 499-500 , 2023
Link: https://doi.org/10.1109/..
 
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3

Optimization of uniformity in plasma ashing process using g..:

Moriya, Tsuyoshi ; Suzuki, Yusuke ; Yonemichi, Hitoshi.
Journal of Physics D: Applied Physics.  56 (2023)  35 - p. 354002 , 2023
Link: https://doi.org/10.1088/..
 
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4

Impact of Cation Vacancies on Leakage Current on TiN/ZrO2/T..:

, In: 2022 International Symposium on Semiconductor Manufacturing (ISSM),
Uedono, Akira ; Takahashi, Naomichi ; Hasunuma, Ryu... - p. 1-4 , 2022
Link: https://doi.org/10.1109/..
 
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5

Systematic Search for Stabilizing Dopants in ZrO2 and HfO2 ..:

, In: 2022 International Symposium on Semiconductor Manufacturing (ISSM),
Harashima, Yosuke ; Koga, Hiroaki ; Ni, Zeyuan... - p. 1-3 , 2022
Link: https://doi.org/10.1109/..
 
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6

Vacancy-type defects in TiN/ZrO2/TiN capacitors probed by m..:

Uedono, Akira ; Takahashi, Naomichi ; Hasunuma, Ryu...
Thin Solid Films.  762 (2022)  - p. 139557 , 2022
Link: https://doi.org/10.1016/..
 
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7

Experimental and numerical analysis of the effects of ion b..:

Li, Hu ; Ito, Tomoko ; Karahashi, Kazuhiro...
Japanese Journal of Applied Physics.  59 (2020)  SJ - p. SJJA01 , 2020
Link: https://doi.org/10.35848..
 
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8

Impact of ion energies in Ar/H2 capacitively coupled radio ..:

Iwashita, Shinya ; Denpoh, Kazuki ; Kikuchi, Takamichi...
Surface and Coatings Technology.  350 (2018)  - p. 740-744 , 2018
Link: https://doi.org/10.1016/..
 
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9

Ion energy control and its applicability to plasma enhanced..:

Iwashita, Shinya ; Denpoh, Kazuki ; Kagaya, Munehito...
Thin Solid Films.  660 (2018)  - p. 865-870 , 2018
Link: https://doi.org/10.1016/..
 
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10

Vacancy-Type Defects Introduced by Gas Cluster Ion-Implanta..:

Uedono, Akira ; Moriya, Tsuyoshi ; Tsutsui, Takuro...
Japanese Journal of Applied Physics.  51 (2012)  11R - p. 111801 , 2012
Link: https://doi.org/10.7567/..
 
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11

Vacancy-Type Defects Introduced by Gas Cluster Ion-Implanta..:

Uedono, Akira ; Moriya, Tsuyoshi ; Tsutsui, Takuro...
Japanese Journal of Applied Physics.  51 (2012)  11R - p. 111801 , 2012
Link: https://doi.org/10.1143/..
 
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12

Reduction of Particle Contamination in Plasma-Etching Equip..:

Ito, Natsuko ; Moriya, Tsuyoshi ; Uesugi, Fumihiko...
Japanese Journal of Applied Physics.  47 (2008)  5R - p. 3630 , 2008
Link: https://doi.org/10.1143/..
 
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13

Observation of Heat-Induced Particle Resuspension and Trans..:

Moriya, Tsuyoshi ; Shimada, Manabu ; Okuyama, Kikuo.
Japanese Journal of Applied Physics.  44 (2005)  7R - p. 4871 , 2005
Link: https://doi.org/10.1143/..
 
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14

A Study of Native Defects in Ag-doped HgCdTe by Positron An..:

Uedono, Akira ; Ozaki, Kazuo ; Ebe, Hiroji...
Japanese Journal of Applied Physics.  36 (1997)  11R - p. 6661 , 1997
Link: https://doi.org/10.1143/..
 
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15

Annealing Properties of Defects in B+- and F+-Implanted Si ..:

Uedono, Akira ; Kitano, Tomohisa ; Hamada, Kouji...
Japanese Journal of Applied Physics.  36 (1997)  5R - p. 2571 , 1997
Link: https://doi.org/10.1143/..
 
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