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2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) ,
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A novel integration scheme for self-aligend Ru topvia as po..:
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2022 IEEE International Interconnect Technology Conference (IITC) ,
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Metal-induced line width variability challenge and mitigati..:
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2022 International Electron Devices Meeting (IEDM) ,
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Subtractive Ru Interconnect Enabled by Novel Patterning Sol..:
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31st International Symposium on Shock Waves 2 ,
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