Muralt, Paul
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1

Piezoelectric thin films for MEMS:

Kanno, Isaku ; Ouyang, Jun ; Akedo, Jun...
Applied Physics Letters.  122 (2023)  9 - p. , 2023
 
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6

Guest Editorial:

Muralt, Paul
Ferroelectrics.  556 (2020)  1 - p. v-ix , 2020
 
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7

List of contributors:

, In: Handbook of Silicon Based MEMS Materials and Technologies,
 
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8

Resonant PZT MEMS Mirror with Segmented Electrodes:

, In: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS),
Piot, Adrien ; Pribosek, Jaka ; Maufay, Jordan... - p. 517-520 , 2020
 
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12

Non-destructive piezoelectric characterisation of Sc doped ..:

, In: 2019 IEEE International Ultrasonics Symposium (IUS),
Mertin, Stefan ; Nyffeler, Clemens ; Makkonen, Tapani... - p. 2592-2595 , 2019
 
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13

Vibrating Piezoelectric Energy Conversion Efficiency of Sol..:

, In: 2019 IEEE International Symposium on Applications of Ferroelectrics (ISAF),
 
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