Nagao, Iori
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1

Low-temperature fabrication of silicon nitride thin films f..:

Kamataki, Kunihiro ; Sasaki, Yusuke ; Nagao, Iori...
Materials Science in Semiconductor Processing.  164 (2023)  - p. 107613 , 2023
 
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3

Effects of amplitude modulated capacitively coupled dischar..:

Abe, Kohei ; Kamataki, Kunihiro ; Yamamoto, Akihiro...
Japanese Journal of Applied Physics.  61 (2022)  10 - p. 106003 , 2022
 
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6

Comparison of multivariate statistical process monitoring m..:

Kano, Manabu ; Nagao, Koji ; Hasebe, Shinji...
Computers & Chemical Engineering.  26 (2002)  2 - p. 161-174 , 2002
 
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7

Comparison of statistical process monitoring methods: appli..:

Kano, Manabu ; Nagao, Koji ; Hasebe, Shinji...
Computers & Chemical Engineering.  24 (2000)  2-7 - p. 175-181 , 2000
 
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