Nagata, Yutaka
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2

At wavelength coherent scatterometry microscope using high-..:

Nagata, Yutaka ; Harada, Tetsuo ; Watanabe, Takeo..
International Journal of Extreme Manufacturing.  1 (2019)  3 - p. 032001 , 2019
 
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Imaging performance improvement of coherent extreme-ultravi..:

Mamezaki, Daiki ; Harada, Tetsuo ; Nagata, Yutaka.
Japanese Journal of Applied Physics.  56 (2017)  6S1 - p. 06GB01 , 2017
 
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10

Extreme ultraviolet mask observations using a coherent extr..:

Fujino, Takahiro ; Tanaka, Yusuke ; Harada, Tetsuo...
Japanese Journal of Applied Physics.  54 (2015)  6S1 - p. 06FC01 , 2015
 
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11

Development of EUV mask inspection system using high-order ..:

Kinoshita, Hiroo ; Harada, Tetsuo ; Nagata, Yutaka..
Japanese Journal of Applied Physics.  53 (2014)  8 - p. 086701 , 2014
 
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12

Phase Imaging of Extreme-Ultraviolet Mask Using Coherent Ex..:

Harada, Tetsuo ; Nakasuji, Masato ; Nagata, Yutaka..
Japanese Journal of Applied Physics.  52 (2013)  6S - p. 06GB02 , 2013
 
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14

Recent Activities on Extreme Ultraviolet Lithography in New..:

Kinoshita, Hiroo ; Watanabe, Takeo ; Harada, Tetsuo.
Japanese Journal of Applied Physics.  52 (2013)  6S - p. 06GA01 , 2013
 
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