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2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) ,
1
Pillar-Type Laser-Induced Graphene Airflow Sensor Assembled..:
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2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) ,
5
Laser-Based Fabrication Process for Piezoresistive Cantilev..:
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2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) ,
7