Ogorodnikov, Alexey I ; Ogorodnikova, Olga M ; Tikhonov, Igor N Ogorodnikov Alexey I. Simulation of defect zones in scribed silicon wafers / Alexey I. Ogorodnikov, Olga M. Ogorodnikova, Igor N. Tikhonov // IOP Conference Series-Materials Science And Engineering. — 2010. — Vol. 15. — 012046. — DOI:10.1088/1757-899X/15/1/012046..
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2010