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Pacco, Antoine
33  results:
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1

Solving the Annealing of Mo Interconnects for Next‐Gen Inte..:

Erofeev, Ivan ; Hartanto, Antony Winata ; Saidov, Khakimjon...
Advanced Electronic Materials.  , 2024
Link: https://doi.org/10.1002/..
 
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2

Controlled and Uniform Wet Etching of Molybdenum Nanowires:

Deng, Ke Rong ; Erofeev, Ivan ; Chowdhuri, Angshuman Ray...
Solid State Phenomena.  346 (2023)  - p. 351-355 , 2023
Link: https://doi.org/10.4028/..
 
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3

Two-metal-level semi-damascene interconnect at metal pitch ..:

, In: 2023 International Electron Devices Meeting (IEDM),
Gupta, Anshul ; Marti, Giulio ; Delie, Gilles... - p. 1-4 , 2023
Link: https://doi.org/10.1109/..
 
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4

Controlled Stepwise Wet Etching of Polycrystalline Mo Nanow..:

Saidov, Khakimjon ; Erofeev, Ivan ; Aabdin, Zainul...
Advanced Functional Materials.  34 (2023)  12 - p. , 2023
Link: https://doi.org/10.1002/..
 
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5

Study on Alternative Dipole Material Wet Clean by pH Contro..:

Tanaka, Yoichi ; Gan, Nobuko ; Ogawa, Yuuichi...
Solid State Phenomena.  346 (2023)  - p. 69-73 , 2023
Link: https://doi.org/10.4028/..
 
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6

Plasma Oxidation of Patterned Mo Nanowires for Precise and ..:

Erofeev, Ivan ; Khan, Muhaimin Mareum ; Aabdin, Zainul...
Solid State Phenomena.  346 (2023)  - p. 346-350 , 2023
Link: https://doi.org/10.4028/..
 
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7

Barrierless ALD Molybdenum for Buried Power Rail and Via-to..:

, In: 2022 IEEE International Interconnect Technology Conference (IITC),
Gupta, Anshul ; Maes, Jan Willem ; Jourdan, Nicolas... - p. 58-60 , 2022
Link: https://doi.org/10.1109/..
 
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8

Controlling the Wet-Etch Directionality in Nanostructured S..:

Aabdin, Zainul ; Ghosh, Tanmay ; Pacco, Antoine...
ACS Applied Electronic Materials.  4 (2022)  11 - p. 5191-5198 , 2022
Link: https://doi.org/10.1021/..
 
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9

Fabrication and room temperature characterization of trilay..:

Wan, Danny ; Couet, Sebastian ; Piao, Xiaoyu...
Japanese Journal of Applied Physics.  60 (2021)  SB - p. SBBI04 , 2021
Link: https://doi.org/10.35848..
 
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10

Controlled cobalt recess for advanced interconnect metalliz..:

Pacco, Antoine ; Akanishi, Yuya ; Le, Quoc Toan...
Microelectronic Engineering.  217 (2019)  - p. 111131 , 2019
Link: https://doi.org/10.1016/..
 
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11

Wet Metal Recess Process for Enabling Scaling Boosters:

Akanishi, Yuya ; Kesters, Els ; Le, Quoc Toan..
ECS Transactions.  92 (2019)  2 - p. 255-263 , 2019
Link: https://doi.org/10.1149/..
 
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12

Selective Wet Etching of Silicon Germanium in Composite Ver..:

Baraissov, Zhaslan ; Pacco, Antoine ; Koneti, Siddardha...
ACS Applied Materials & Interfaces.  11 (2019)  40 - p. 36839-36846 , 2019
Link: https://doi.org/10.1021/..
 
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13

Scaled-Down c-Si and c-SiGe Wagon-Wheels for the Visualizat..:

Pacco, Antoine ; Tao, Zheng ; Rip, Jens...
Nanoscale Research Letters.  14 (2019)  1 - p. , 2019
Link: https://doi.org/10.1186/..
 
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14

Visualizing anisotropy in the surface oxidation of germaniu..:

Abrenica, Graniel Harne A. ; Lebedev, Mikhail V. ; Pacco, Antoine...
Chemical Communications.  55 (2019)  73 - p. 10864-10867 , 2019
Link: https://doi.org/10.1039/..
 
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15

Non-destructive characterization of extended crystalline de..:

Schulze, Andreas ; Strakos, Libor ; Vystavel, Tomas...
Nanoscale.  10 (2018)  15 - p. 7058-7066 , 2018
Link: https://doi.org/10.1039/..
 
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