Perego, Michele
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1

Sequential Infiltration Synthesis of Al2O3 in PMMA Thin Fil..:

Motta, Alessia ; Seguini, Gabriele ; Wiemer, Claudia.
ACS Applied Materials & Interfaces.  16 (2024)  27 - p. 35825-35833 , 2024
 
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Electrical characterization of thin silicon-on-insulator fi..:

Pulici, Andrea ; Kuschlan, Stefano ; Seguini, Gabriele...
Materials Science in Semiconductor Processing.  163 (2023)  - p. 107548 , 2023
 
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6

Doping of silicon by phosphorus end-terminated polymers: sh..:

, In: 2023 21st International Workshop on Junction Technology (IWJT),
 
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7

Periodic Arrays of Dopants in Silicon by Ultralow Energy Im..:

Kuschlan, Stefano ; Chiarcos, Riccardo ; Laus, Michele...
ACS Applied Materials & Interfaces.  15 (2023)  50 - p. 57928-57940 , 2023
 
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9

Phosphorus activation in silicon: To deglaze or not to degl..:

Barin, Gianluca ; Seguini, Gabriele ; Chiarcos, Riccardo...
Materials Science in Semiconductor Processing.  165 (2023)  - p. 107691 , 2023
 
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10

E-MRS Fall Meeting 2022 Symposium L "Doping at the Nanoscal..:

Napolitani, Enrico ; Perego, Michele ; Capasso, Andrea.
Materials Science in Semiconductor Processing.  167 (2023)  - p. 107755 , 2023
 
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13

Improving HfO2-Based Resistive Switching Devices by Inserti..:

Wang, Tao ; Brivio, Stefano ; Cianci, Elena...
ACS Applied Materials & Interfaces.  14 (2022)  21 - p. 24565-24574 , 2022
 
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