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Pfitzner, Lothar
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1

Contact related Failure Detection of Semiconductor Layer St.. 

FAU Forschungen, Reihe B, Medizin, Naturwissenschaft, Technik ; 33
Unterreitmeier, Marianne , 2020
Link: https://nbn-resolving.de..
 
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2

Nano- and Micro-Patterned PDMS Thin-films for Biomedical De..:

Scharin-Mehlmann, Marina , 2020
Link: https://nbn-resolving.de..
 
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3

Advanced Detection and Removal Method of Polymer Residues i..:

Gehles, Helene , 2019
Link: https://nbn-resolving.de..
 
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4

Nanoelectronics Research Gaps and Recommendations: A Report..:

Galatsis, Kosmas ; Gargini, Paolo ; Hiramoto, Toshiro...
IEEE Technology and Society Magazine.  34 (2015)  2 - p. 21-30 , 2015
Link: https://doi.org/10.1109/..
 
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5

Metrology, Analysis and Characterization in Micro- and Nano..:

Pfitzner, Lothar ; Nutsch, Andreas ; Oechsner, Richard...
ECS Transactions.  10 (2007)  1 - p. 35-49 , 2007
Link: https://doi.org/10.1149/..
 
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6

Trends in European R&D - Advanced Process Control Down to A..:

Pfitzner, Lothar ; Schellenberger, M. ; Oechsner, R...
ECS Transactions.  2 (2006)  2 - p. 33-54 , 2006
Link: https://doi.org/10.1149/..
 
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7

A roadmap towards cost efficient 300mm equipment:

Pfitzner, Lothar ; Kücher, Peter
Materials Science in Semiconductor Processing.  5 (2002)  4-5 - p. 321-331 , 2002
Link: https://doi.org/10.1016/..
 
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8

From overall equipment efficiency (OEE) to overall Fab effe..:

Oechsner, Richard ; Pfeffer, Markus ; Pfitzner, Lothar...
Materials Science in Semiconductor Processing.  5 (2002)  4-5 - p. 333-339 , 2002
Link: https://doi.org/10.1016/..
 
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9

Cost reduction strategies for wafer expenditure:

Pfitzner, Lothar ; Benesch, Norbert ; Öchsner, Richard...
Microelectronic Engineering.  56 (2001)  1-2 - p. 61-71 , 2001
Link: https://doi.org/10.1016/..
 
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10

Novel process control strategies for 300 mm semiconductor p..:

Pfitzner, Lothar ; Oechsner, Richard ; Schneider, Claus...
Microelectronic Engineering.  45 (1999)  2-3 - p. 247-256 , 1999
Link: https://doi.org/10.1016/..
 
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11

Process Optimization by Means of Integrated Monitoring Tool..:

Pfitzner, Lothar H. ; Nutsch, Andreas ; Roeder, Georg.
ECS Transactions.  11 (2007)  3 - p. 3-21 , 2007
Link: https://doi.org/10.1149/..
 
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12

Developing a framework for virtual metrology and predictive..:

Schellenberger, M ; Roeder, Georg ; Mattes, Andreas...
https://opus.bibliothek.uni-augsburg.de/opus4/frontdoor/index/index/docId/44444.  , 2018
Link: https://opus.bibliothek...
 
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13

Vocal and Piano Recital: Petersen, Marlis / Radicke, Camill.. 

Naxos Music Library
Loewe, Carl ; Kopisch, August ; Heine, Heinrich... , 2018
Link: http://suub.naxosmusicli..
 
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