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Pfusterschmied, Georg
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1

Plasma-enhanced chemical vapor deposition a-SiOCN:H low-Z t..:

Berger, Claudio ; Schneider, Michael ; Pfusterschmied, Georg.
Journal of Applied Physics.  135 (2024)  16 - p. , 2024
Link: https://doi.org/10.1063/..
 
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2

Impact of Grain Size on The Q-Factor of Poly-Crystalline Di..:

, In: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS),
Huber, Dominik ; Platz, Daniel ; Gesing, Andre... - p. 915-918 , 2024
Link: https://doi.org/10.1109/..
 
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3

Impact of Excess Carbon at the 3C-SiC/SiO2 Interface Using ..:

, In: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS),
Moll, Philipp ; Pfusterschmied, Georg ; Schmid, Ulrich - p. 606-609 , 2024
Link: https://doi.org/10.1109/..
 
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4

Impact of alternating precursor supply and gas flow on the ..:

Moll, Philipp ; Pfusterschmied, Georg ; Schwarz, Sabine..
Sensors and Actuators A: Physical.  372 (2024)  - p. 115376 , 2024
Link: https://doi.org/10.1016/..
 
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5

Robust Polycrystalline 3C-Sic-on-Si Heterostructures with L..:

, In: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS),
Moll, Philipp ; Pfusterschmied, Georg ; Schmid, Ulrich - p. 590-593 , 2023
Link: https://doi.org/10.1109/..
 
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6

Three‐dimensional graphene on a nano‐porous 4H‐silicon carb..:

Veronesi, Stefano ; Vlamidis, Ylea ; Ferbel, Letizia...
Journal of the Science of Food and Agriculture.  , 2023
Link: https://doi.org/10.1002/..
 
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7

Study of hydrogen absorption in a novel three-dimensional g..:

Macili, Aureliano ; Vlamidis, Ylea ; Pfusterschmied, Georg...
Applied Surface Science.  615 (2023)  - p. 156375 , 2023
Link: https://doi.org/10.1016/..
 
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8

The gas-liquid-Q-factor-inversion in MEMS plate resonators:

Gesing, Andre ; Tran, Thomas ; Huber, Dominik...
Journal of Sound and Vibration.  559 (2023)  - p. 117777 , 2023
Link: https://doi.org/10.1016/..
 
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9

Biocompatible a-SiC:H-Based Bistable MEMS Membranes With Pi..:

Moll, Philipp ; Pfusterschmied, Georg ; Schneider, Michael...
Journal of Microelectromechanical Systems.  31 (2022)  3 - p. 372-383 , 2022
Link: https://doi.org/10.1109/..
 
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10

3D arrangement of epitaxial graphene conformally grown on p..:

Veronesi, Stefano ; Pfusterschmied, Georg ; Fabbri, Filippo...
Carbon.  189 (2022)  - p. 210-218 , 2022
Link: https://doi.org/10.1016/..
 
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11

Communication—Current Oscillations in Photoelectrochemical ..:

Leitgeb, Markus ; Pfusterschmied, Georg ; Schwarz, Sabine...
ECS Journal of Solid State Science and Technology.  10 (2021)  7 - p. 073003 , 2021
Link: https://doi.org/10.1149/..
 
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12

Ti/4H-SiC schottky barrier modulation by ultrathin a-SiC:H ..:

Triendl, Fabian ; Pfusterschmied, Georg ; Berger, Claudio...
Thin Solid Films.  721 (2021)  - p. 138539 , 2021
Link: https://doi.org/10.1016/..
 
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13

Piezoelectric Switching of Bistable MEMS Membranes in Fluid:

, In: 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS),
Moll, Philipp ; Pfusterschmied, Georg ; Schneide, Michael.. - p. 544-547 , 2021
Link: https://doi.org/10.1109/..
 
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14

High performance piezoelectric AlN MEMS resonators for prec..:

Schneider, Michael ; Pfusterschmied, Georg ; Patocka, Florian.
e & i Elektrotechnik und Informationstechnik.  137 (2020)  3 - p. 121-127 , 2020
Link: https://doi.org/10.1007/..
 
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15

Sensing Fluid Properties of Super High Viscous Liquids Usin..:

, In: 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS),
Pfusterschmied, Georg ; Weinmann, Christoph ; Hospodka, Markus... - p. 735-738 , 2019
Link: https://doi.org/10.1109/..
 
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