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2024 Conference of Science and Technology for Integrated Circuits (CSTIC) ,
1
Effect of Surfactants on CMP Properties of C-, A- and R-Pla..:
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2023 China Semiconductor Technology International Conference (CSTIC) ,
10
Effect of Surfactants on CMP Properties of M-Plane Sapphire:
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2022 China Semiconductor Technology International Conference (CSTIC) ,
13
Component Optimization of Sapphire Slurry Based on Response..:
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2022 China Semiconductor Technology International Conference (CSTIC) ,
15