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2022 IEEE International Ultrasonics Symposium (IUS) ,
1
Sputtered PZT pMUT with Bias-Tunable Electromechanical Coup..:
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2022 IEEE International Ultrasonics Symposium (IUS) ,
2
Correlation of Wafer-scale Film Stress Effects on ScAlN pMU..:
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2019 IEEE International Ultrasonics Symposium (IUS) ,
5