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Quenzer, H.J.
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1

Optical Simulation for an Optimized Wafer Level Optopackage..:

Stenchly, V. ; Schwarz, F. ; Quenzer, H.J..
Procedia Engineering.  120 (2015)  - p. 1253-1256 , 2015
Link: https://doi.org/10.1016/..
 
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2

Gas Flow Sputtered Thick Layers of Columnar Lead Zirconate ..:

Tiefensee, F. ; Kaden, D. ; Jakob, A...
Physics Procedia.  70 (2015)  - p. 957-960 , 2015
Link: https://doi.org/10.1016/..
 
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3

High Frequency 1D Piezoelectric Resonant Microscanners with..:

Gu-Stoppel, S. ; Janes, J. ; Quenzer, H.J....
Procedia Engineering.  87 (2014)  - p. 1593-1596 , 2014
Link: https://doi.org/10.1016/..
 
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4

High Speed Piezoelectric Microscanners with Large Deflectio..:

Gu-Stoppel, S. ; Kaden, D. ; Quenzer, H.J...
Procedia Engineering.  47 (2012)  - p. 56-59 , 2012
Link: https://doi.org/10.1016/..
 
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5

Sputtered thin film piezoelectric aluminum nitride as a fun..:

Marauska, S. ; Hrkac, V. ; Dankwort, T....
Microsystem Technologies.  18 (2012)  6 - p. 787-795 , 2012
Link: https://doi.org/10.1007/..
 
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6

Fabrication of conducting AFM cantilevers with AlN-based pi..:

Quenzer, H.J. ; Drechsler, U. ; Sebastian, A....
Procedia Engineering.  25 (2011)  - p. 665-668 , 2011
Link: https://doi.org/10.1016/..
 
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7

Sputtered thin film piezoelectric aluminium nitride as a fu..:

Marauska, S. ; Dankwort, T. ; Quenzer, H.J..
Procedia Engineering.  25 (2011)  - p. 1341-1344 , 2011
Link: https://doi.org/10.1016/..
 
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8

Development of a piezoelectric lead titanate thin film proc..:

Jacobsen, H. ; Jung, Th. ; Ortner, K....
Sensors and Actuators A: Physical.  133 (2007)  1 - p. 250-258 , 2007
Link: https://doi.org/10.1016/..
 
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9

Thick PZT layers deposited by gas flow sputtering:

Jacobsen, H. ; Quenzer, H.-J. ; Wagner, B...
Sensors and Actuators A: Physical.  135 (2007)  1 - p. 23-27 , 2007
Link: https://doi.org/10.1016/..
 
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10

One-level gray-tone design — Mask data preparation and patt..:

Reimer, K. ; Henke, W. ; Quenzer, H.J...
Microelectronic Engineering.  30 (1996)  1-4 - p. 559-562 , 1996
Link: https://doi.org/10.1016/..
 
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11

Ultraviolet Depth Lithography and Galvanoforming for Microm..:

Löchel, B. ; Maciossek, A. ; Quenzer, H. J..
Journal of The Electrochemical Society.  143 (1996)  1 - p. 237-244 , 1996
Link: https://doi.org/10.1149/..
 
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12

Microfabrication of complex surface topographies using grey..:

Wagner, B. ; Quenzer, H.J. ; Henke, W...
Sensors and Actuators A: Physical.  46 (1995)  1-3 - p. 89-94 , 1995
Link: https://doi.org/10.1016/..
 
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13

Magnetically driven microstructures fabricated with multila..:

Löchel, B. ; Maciossek, A. ; Quenzer, H.-J...
Sensors and Actuators A: Physical.  46 (1995)  1-3 - p. 98-103 , 1995
Link: https://doi.org/10.1016/..
 
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14

Galvanoplating and sacrificial layers for surface micromach..:

Maciossek, A. ; Lo¨chel, B. ; Quenzer, H.-J....
Microelectronic Engineering.  27 (1995)  1-4 - p. 503-508 , 1995
Link: https://doi.org/10.1016/..
 
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15

Fabrication of relief-topographic surfaces with a one-step ..:

Quenzer, H. J. ; Henke, W. ; Hoppe, W....
Microsystem Technologies.  1 (1995)  4 - p. 196-201 , 1995
Link: https://doi.org/10.1007/..
 
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