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Rezvanov, A. A.
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1

Computer Modeling of Plasma-Enhanced Atomic Layer Depositio..:

Zyuzin, S. S. ; Ganykina, E. A. ; Rezvanov, A. A....
Russian Microelectronics.  52 (2023)  S1 - p. S184-S193 , 2023
Link: https://doi.org/10.1134/..
 
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2

Buffer Layers for Nonvolatile Ferroelectric Memory Based on..:

Reznik, A. A. ; Rezvanov, A. A. ; Zyuzin, S. S.
Russian Microelectronics.  52 (2023)  S1 - p. S38-S43 , 2023
Link: https://doi.org/10.1134/..
 
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3

Dielectric Barrier in the Subtractive Process of Formation ..:

Orlov, A. A. ; Rezvanov, A. A. ; Gvozdev, V. A....
Russian Microelectronics.  51 (2022)  6 - p. 470-479 , 2022
Link: https://doi.org/10.1134/..
 
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4

Benzene bridged hybrid organosilicate films with improved s..:

Rezvanov, A.A. ; Vishnevskiy, A.S. ; Seregin, D.S....
Materials Chemistry and Physics.  290 (2022)  - p. 126571 , 2022
Link: https://doi.org/10.1016/..
 
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5

Accounting for the Porosity of the Material in the Simulati..:

Orlov, A. A. ; Ganykina, E. A. ; Rezvanov, A. A.
Russian Microelectronics.  51 (2022)  8 - p. 633-636 , 2022
Link: https://doi.org/10.1134/..
 
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6

Biotechnology of wastewater treatment of dairy industry ent..:

Smolyanichenko, A S ; Yakovleva, E V ; Rezvanov, A A.
IOP Conference Series: Earth and Environmental Science.  979 (2022)  1 - p. 012134 , 2022
Link: https://doi.org/10.1088/..
 
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7

Evaluation of Mechanical Properties of Porous OSG Films by ..:

Ovchinnikov, I. S. ; Vishnevskiy, A. S. ; Seregin, D. S....
Langmuir.  36 (2020)  32 - p. 9377-9387 , 2020
Link: https://doi.org/10.1021/..
 
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8

Application of MAO coatings in a two-stroke internal combus..:

Sakulin, R ; Rezvanov, D ; Rezyapov, T
IOP Conference Series: Materials Science and Engineering.  709 (2020)  2 - p. 022036 , 2020
Link: https://doi.org/10.1088/..
 
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9

Area selective grafting of siloxane molecules on low-k diel..:

Rezvanov, A. ; Gornev, E.S. ; de Marneffe, J.-F..
Applied Surface Science.  476 (2019)  - p. 317-324 , 2019
Link: https://doi.org/10.1016/..
 
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10

Low-k protection from F radicals and VUV photons using a mu..:

Zotovich, A ; Rezvanov, A ; Chanson, R...
Journal of Physics D: Applied Physics.  51 (2018)  32 - p. 325202 , 2018
Link: https://doi.org/10.1088/..
 
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11

Modeling the Dynamics of the Integral Dielectric Permittivi..:

Rezvanov, A. A. ; Matyushkin, I. V. ; Gushchin, O. P..
Russian Microelectronics.  47 (2018)  6 - p. 415-426 , 2018
Link: https://doi.org/10.1134/..
 
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12

Gas Phase Pore Stuffing for the protection of organo-silica..:

, In: 2018 International Symposium on Semiconductor Manufacturing (ISSM),
Fujikawa, M. ; Sato, N. ; de Marneffe, J. -F.... - p. 1-3 , 2018
Link: https://doi.org/10.1109/..
 
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13

First‐Principles Calculation of Basic Properties of Rhomboh..:

Reznik, Alexander ; Konstantinov, Vyacheslav ; Ganykina, Ekaterina.
physica status solidi (b).  , 2024
Link: https://doi.org/10.1002/..
 
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14

Simulation of time to failure of porous dielectric in advan..:

Orlov, Andrey A. ; Rezvanov, Askar A.
Modern Electronic Materials.  8 (2022)  3 - p. 107-111 , 2022
Link: https://doi.org/10.3897/..
 
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15

Modification of Porous Ultralow-k Film by Vacuum Ultraviole..:

Zotovich, Alexey I. ; Zyryanov, Sergey M. ; Lopaev, Dmitry V....
ACS Applied Electronic Materials.  4 (2022)  6 - p. 2760-2776 , 2022
Link: https://doi.org/10.1021/..
 
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