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Roussy, Agnes
17  results:
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1

Scheduling Semiconductor Manufacturing Operations in Resear..:

, In: 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),
Borodin, Valeria ; Fischer, Vincent ; Roussy, Agnes. - p. 1-6 , 2024
Link: https://doi.org/10.1109/..
 
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2

Random Forest Based R2R Control: Application to Chemical Me..:

, In: 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),
Terras, Lucile ; Alegret, Cyril ; Pasqualini, Francois. - p. 1-6 , 2023
Link: https://doi.org/10.1109/..
 
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3

Feature Selection for Virtual Metrology Modeling: An applic..:

, In: 2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),
Djedidi, Oussama ; Clain, Rebecca ; Borodin, Valeria. - p. 1-6 , 2022
Link: https://doi.org/10.1109/..
 
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4

On Updating a Virtual Metrology Model in Semiconductor Manu..:

, In: 2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),
Clain, Rebecca ; Azzizi, Ikram ; Borodin, Valeria. - p. 1-6 , 2022
Link: https://doi.org/10.1109/..
 
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5

An interpretable unsupervised Bayesian network model for fa..:

Yang, Wei-Ting ; Reis, Marco S. ; Borodin, Valeria..
Control Engineering Practice.  127 (2022)  - p. 105304 , 2022
Link: https://doi.org/10.1016/..
 
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6

A physics-informed Run-to-Run control framework for semicon..:

Yang, Wei-Ting ; Blue, Jakey ; Roussy, Agnès..
Expert Systems with Applications.  155 (2020)  - p. 113424 , 2020
Link: https://doi.org/10.1016/..
 
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7

Virtual metrology modeling based on gaussian bayesian netwo..:

, In: Proceedings of the 2018 Winter Simulation Conference,
Yang, Wei-Ting ; Blue, Jakey ; Roussy, Agnès.. - p. 3574-3582 , 2018
Link: https://dl.acm.org/doi/1..
 
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8

Run-to-run sensor variation monitoring for process fault di..:

, In: Proceedings of the 2016 Winter Simulation Conference,
Blue, Jakey ; Roussy, Agnès ; Pinaton, Jacques - p. 2523-2534 , 2016
Link: https://dl.acm.org/doi/1..
 
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9

Optimization of OC-SVM engine used for out-of-control detec..:

, In: 2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),
Ilham, Rabhi ; Agnes, Roussy ; Francois, Pasqualini - p. 1-6 , 2022
Link: https://doi.org/10.1109/..
 
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10

Signal shape study from process control by interferometry f..:

Bourzgui, Sophia ; Roussy, Agnès ; Blue, Jakey..
hal-02415540.  , 2019
Link: https://hal.science/hal-..
 
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11

Signal shape study from process control by interferometry f..:

Bourzgui, Sophia ; Roussy, Agnès ; Blue, Jakey..
hal-02415540.  , 2019
Link: https://hal.archives-ouv..
 
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12

The light behavior from Shallow Trench Isolation profiles a..:

Bourzgui, Sophia ; Georges, Gaelle ; Roussy, Agnès...
info:eu-repo/semantics/altIdentifier/doi/10.1117/12.2320966.  , 2018
Link: https://hal.archives-ouv..
 
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13

The light behavior from Shallow Trench Isolation profiles a..:

Bourzgui, Sophia ; Georges, Gaelle ; Roussy, Agnès...
info:eu-repo/semantics/altIdentifier/doi/10.1117/12.2320966.  , 2018
Link: https://hal.science/hal-..
 
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14

Device pattern impact on optical endpoint detection by inte..:

Bourzgui, Sophia ; Roussy, Agnès ; Blue, Jakey...
hal-01622593.  , 2017
Link: https://hal.science/hal-..
 
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15

Embedded spectroscopic reflectometry metrology on FEOL sili..:

Bourzgui, Sophia ; Roussy, Agnès ; Blue, Jakey...
info:eu-repo/semantics/altIdentifier/doi/10.1109/ASMC.2017.7969267.  , 2017
Link: https://hal.science/hal-..
 
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