Ruther, Patrick
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6

Hierarchical Bonding Yield Test Structure for Flexible High..:

, In: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS),
Odenthal, Marie C. ; Claar, Victor ; Paul, Oliver. - p. 409-412 , 2023
 
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7

New Wafer-Level Fabrication of Ultrathin Silicon Insertion ..:

, In: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS),
Sharma, Kirti ; Boehler, Christian ; Asplund, Maria.. - p. 421-424 , 2023
 
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15

Planar-Type Nano-Silicon Thermoelectric Generator Over 100 ..:

, In: 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS),
Yanagisawa, Ryoto ; Ruther, Patrick ; Paul, Oliver... - p. 114-116 , 2022
 
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