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Sahir, Samrina
9
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1
Effect of slurry particles on PVA brush contamination durin..:
Sahir, Samrina
;
Cho, Hwi-Won
;
Jalalzai, Palwasha
...
Materials Science in Semiconductor Processing. 151 (2022) - p. 107043 , 2022
Link:
https://doi.org/10.1016/..
?
2
Effect of Slurry Additives on Co-BTA Complex Stability and ..:
Jalalzai, Palwasha
;
Ryu, Heon-Yul
;
Sahir, Samrina
...
ECS Journal of Solid State Science and Technology. 11 (2022) 8 - p. 084006 , 2022
Link:
https://doi.org/10.1149/..
?
3
Effect of Skin Layer on Brush Loading, Cross-Contamination,..:
Sahir, Samrina
;
Cho, Hwi-Won
;
Jalalzai, Palwasha
...
ECS Journal of Solid State Science and Technology. 11 (2022) 5 - p. 054003 , 2022
Link:
https://doi.org/10.1149/..
?
4
Study on PVA Brush Loading and Conditioning during Shallow ..:
Sahir, Samrina
;
Cho, Hwi-Won
;
Kim, Tae-Gon
...
ECS Journal of Solid State Science and Technology. 11 (2022) 2 - p. 024004 , 2022
Link:
https://doi.org/10.1149/..
?
5
Tungsten passivation layer (WO3) formation mechanisms durin..:
Poddar, Maneesh Kumar
;
Jalalzai, Palwasha
;
Sahir, Samrina
...
Applied Surface Science. 537 (2021) - p. 147862 , 2021
Link:
https://doi.org/10.1016/..
?
6
Mechanisms of colloidal ceria contamination and cleaning du..:
Sahir, Samrina
;
Yerriboina, Nagendra Prasad
;
Han, So-Young
...
Microelectronic Engineering. 241 (2021) - p. 111544 , 2021
Link:
https://doi.org/10.1016/..
?
7
Investigation of the effect of different cleaning forces on..:
Sahir, Samrina
;
Yerriboina, Nagendra Prasad
;
Han, So-Young
...
Applied Surface Science. 545 (2021) - p. 149035 , 2021
Link:
https://doi.org/10.1016/..
?
8
Contamination Mechanism of Ceria Particles on the Oxide Sur..:
Han, Kwang-Min
;
Han, So-Young
;
Sahir, Samrina
...
ECS Journal of Solid State Science and Technology. 9 (2020) 12 - p. 124004 , 2020
Link:
https://doi.org/10.1149/..
?
9
The Adhesion and Removal Mechanism of Ceria Particles for S..:
Yerriboina, Nagendra Prasad
;
Sahir, Samrina
;
Han, So-Young
..
ECS Transactions. 92 (2019) 2 - p. 157-164 , 2019
Link:
https://doi.org/10.1149/..
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