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2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ,
1
Wet Etch Recipe Optimization for Enabling RMG Multi Vt Sche..:
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2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ,
2
Reliable Cu Pillar Undercut Control Using the Endpoint Dete..:
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2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ,
3
ScCO2 Drying for Preventing Pattern Collapse in Advanced Lo..:
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2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ,
4
Manufacturing Yield Improvement for Advanced CMOS Technolog..:
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2022 International Electron Devices Meeting (IEDM) ,
6
Hardware Based Performance Assessment of Vertical-Transport..:
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2021 IEEE International Electron Devices Meeting (IEDM) ,
7
Vertical-Transport Nanosheet Technology for CMOS Scaling be..:
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2020 IEEE Symposium on VLSI Technology ,
8
Selective Enablement of Dual Dipoles for Near Bandedge Mult..:
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2019 IEEE International Electron Devices Meeting (IEDM) ,
9
Multiple-Vt Solutions in Nanosheet Technology for High Perf..:
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2019 IEEE International Electron Devices Meeting (IEDM) ,
10