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Schüngel, E
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1

Electron power absorption dynamics in capacitive radio freq..:

Brandt, S ; Berger, B ; Schüngel, E...
Plasma Sources Science and Technology.  25 (2016)  4 - p. 045015 , 2016
Link: https://doi.org/10.1088/..
 
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2

Tailored voltage waveform capacitively coupled plasmas in e..:

Schüngel, E ; Korolov, I ; Bruneau, B...
Journal of Physics D: Applied Physics.  49 (2016)  26 - p. 265203 , 2016
Link: https://doi.org/10.1088/..
 
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3

Slope and amplitude asymmetry effects on low frequency capa..:

Bruneau, B. ; Korolov, I. ; Lafleur, T....
Journal of Applied Physics.  119 (2016)  16 - p. , 2016
Link: https://doi.org/10.1063/..
 
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4

Deposition of microcrystalline intrinsic silicon by the Ele..:

Hrunski, D. ; Mootz, F. ; Zeuner, A....
Vacuum.  87 (2013)  - p. 114-118 , 2013
Link: https://doi.org/10.1016/..
 
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5

Effect of structured electrodes on heating and plasma unifo..:

Schmidt, N ; Schulze, J ; Schüngel, E.
Journal of Physics D: Applied Physics.  46 (2013)  50 - p. 505202 , 2013
Link: https://doi.org/10.1088/..
 
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6

The effect of dust on electron heating and dc self-bias in ..:

Schüngel, E ; Mohr, S ; Iwashita, S..
Journal of Physics D: Applied Physics.  46 (2013)  17 - p. 175205 , 2013
Link: https://doi.org/10.1088/..
 
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7

The electrical asymmetry effect in geometrically asymmetric..:

Schüngel, E. ; Eremin, D. ; Schulze, J...
Journal of Applied Physics.  112 (2012)  5 - p. , 2012
Link: https://doi.org/10.1063/..
 
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8

Coupling effects in inductive discharges with radio frequen..:

Schulze, J. ; Schüngel, E. ; Czarnetzki, U.
Applied Physics Letters.  100 (2012)  2 - p. , 2012
Link: https://doi.org/10.1063/..
 
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9

Control of plasma properties in capacitively coupled oxygen..:

Schüngel, E ; Zhang, Q-Z ; Iwashita, S...
Journal of Physics D: Applied Physics.  44 (2011)  28 - p. 285205 , 2011
Link: https://doi.org/10.1088/..
 
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10

The effect of secondary electrons on the separate control o..:

Donkó, Z. ; Schulze, J. ; Hartmann, P....
Applied Physics Letters.  97 (2010)  8 - p. , 2010
Link: https://doi.org/10.1063/..
 
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11

Charge dynamics in capacitively coupled radio frequency dis..:

Schulze, J ; Schüngel, E ; Donkó, Z.
Journal of Physics D: Applied Physics.  43 (2010)  22 - p. 225201 , 2010
Link: https://doi.org/10.1088/..
 
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12

Phase resolved optical emission spectroscopy: a non-intrusi..:

Schulze, J ; Schüngel, E ; Donkó, Z..
Journal of Physics D: Applied Physics.  43 (2010)  12 - p. 124016 , 2010
Link: https://doi.org/10.1088/..
 
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13

The electrical asymmetry effect in capacitively coupled rad..:

Schulze, J ; Schüngel, E ; Czarnetzki, U
Journal of Physics D: Applied Physics.  42 (2009)  9 - p. 092005 , 2009
Link: https://doi.org/10.1088/..
 
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14

Optimization of the electrical asymmetry effect in dual-fre..:

Schulze, J. ; Schüngel, E. ; Czarnetzki, U..
Journal of Applied Physics.  106 (2009)  6 - p. , 2009
Link: https://doi.org/10.1063/..
 
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15

Striations in electronegative capacitively coupled radio-fr..:

Liu, Y.X ; Korolov, I ; Schüngel, E..
http://real.mtak.hu/165606/1/1703.05886.pdf.  , 2017
Link: http://real.mtak.hu/1656..
 
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