Schmid, U.D.
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1

Stress analysis of circular membrane-type MEMS microphones ..:

Ullmann, P.G. ; Bretthauer, C. ; Schneider, M..
Sensors and Actuators A: Physical.  349 (2023)  - p. 114003 , 2023
 
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2

Stress engineering of polycrystalline aluminum nitride thin..:

Schlögl, M. ; Weißenbach, J. ; Schneider, M..
Sensors and Actuators A: Physical.  349 (2023)  - p. 114067 , 2023
 
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3

Physica status solidi 

Volume 127, Number 1: January 1  Physica status solidi ; Volume 127, Number 1, B
Abrikosov, N. Kh ; Agafonov, A. I ; Alcalá, R... - Reprint 2021 . , [2022]
 
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5

Piezoelectricity in Y0.09Al0.91N thin films:

Schlögl, M. ; Schneider, M. ; Schmid, U.
Materials Science and Engineering: B.  276 (2022)  - p. 115543 , 2022
 
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6

Mechanical and electrical characterization of resonant piez..:

Schlögl, M. ; Köpl, S. ; Hiesberger, J...
Sensors and Actuators A: Physical.  346 (2022)  - p. 113829 , 2022
 
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7

Accuracy and precision of resonant piezoelectric MEMS visco..:

Alasatri, S. ; Schneider, M. ; Mirwald, J...
Sensors and Actuators A: Physical.  347 (2022)  - p. 113903 , 2022
 
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10

Impact of Ar+ bombardment of 4H–SiC substrates on Schottky ..:

Pfusterschmied, G. ; Triendl, F. ; Schneider, M..
Materials Science in Semiconductor Processing.  123 (2021)  - p. 105504 , 2021
 
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11

Barrier height tuning by inverse sputter etching at poly-Si..:

Triendl, F ; Pfusterschmied, G ; Schwarz, S...
Semiconductor Science and Technology.  36 (2021)  5 - p. 055021 , 2021
 
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12

Si/4H–SiC heterostructure formation using metal-induced cry..:

Triendl, F. ; Pfusterschmied, G. ; Schwarz, S...
Materials Science in Semiconductor Processing.  128 (2021)  - p. 105763 , 2021
 
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13

High finesse microcavities in the optical telecom O-band:

Fait, J. ; Putz, S. ; Wachter, G....
Applied Physics Letters.  119 (2021)  22 - p. , 2021
 
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14

Growth and characterization of low pressure chemical vapor ..:

Triendl, F. ; Pfusterschmied, G. ; Pobegen, G....
Materials Science in Semiconductor Processing.  131 (2021)  - p. 105888 , 2021
 
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