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Shidoji, Eiji
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1
Numerical simulation of plasma confinement in DC magnetron ..:
Kageyama, Junichi
;
Yoshimoto, Mamoru
;
Matsuda, Akifumi
..
Japanese Journal of Applied Physics. 53 (2014) 8 - p. 088001 , 2014
Link:
https://doi.org/10.7567/..
?
2
Improving Mobility of F-Doped SnO2Thin Films by Introducing..:
Isshiki, Masanobu
;
Ikeda, Toru
;
Okubo, Junichi
...
Japanese Journal of Applied Physics. 51 (2012) 9R - p. 095801 , 2012
Link:
https://doi.org/10.7567/..
?
3
Improving Mobility of F-Doped SnO2 Thin Films by Introducin..:
Isshiki, Masanobu
;
Ikeda, Toru
;
Okubo, Junichi
...
Japanese Journal of Applied Physics. 51 (2012) 9R - p. 095801 , 2012
Link:
https://doi.org/10.1143/..
?
4
Magnetron plasma structure with strong magnetic field:
Shidoji, Eiji
;
Makabe, Toshiaki
Thin Solid Films. 442 (2003) 1-2 - p. 27-31 , 2003
Link:
https://doi.org/10.1016/..
?
5
Influence of gas pressure and magnetic field upon dc magnet..:
Shidoji, Eiji
;
Ness, Kevin
;
Makabe, Toshiaki
Vacuum. 60 (2001) 3 - p. 299-306 , 2001
Link:
https://doi.org/10.1016/..
?
6
Two-Dimensional Self-Consistent Simulation of a DC Magnetro..:
Shidoji, Eiji
;
Ohtake, Hiroto
;
Nakano, Nobuhiko
.
Japanese Journal of Applied Physics. 38 (1999) 4R - p. 2131 , 1999
Link:
https://doi.org/10.1143/..
?
7
Prediction of the evolution of the erosion profile in a dir..:
Okazawa, Katsunori
;
Shidoji, Eiji
;
Makabe, Toshiaki
Journal of Applied Physics. 86 (1999) 6 - p. 2984-2989 , 1999
Link:
https://doi.org/10.1063/..
?
8
Numerical simulation of the discharge in d.c. magnetron spu..:
Shidoji, Eiji
;
Nakano, Nobuhiko
;
Makabe, Toshiaki
Thin Solid Films. 351 (1999) 1-2 - p. 37-41 , 1999
Link:
https://doi.org/10.1016/..
?
9
Three-Dimensional Simulation of Target Erosion in DC Magnet..:
Shidoji, Eiji
;
Nemoto, Masaharu
;
Takuji Nomura, Takuji Nomura
.
Japanese Journal of Applied Physics. 33 (1994) 7S - p. 4281 , 1994
Link:
https://doi.org/10.1143/..
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