Shimomura, Shinichiro
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ScCO2 Drying for Preventing Pattern Collapse in Advanced Lo..:

, In: 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),
 
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Reactive infiltration of magnesium vapor into alumina powde..:

Watari, Takanori ; Shimomura, Shin-ichiro ; Torikai, Toshio.
Journal of the European Ceramic Society.  19 (1999)  10 - p. 1889-1893 , 1999
 
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