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Shiono, Tsubasa
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Formation of basal plane dislocations by stress near epilay..:
Fujie, Fumihiro
;
Shiono, Tsubasa
;
Murata, Koichi
...
Journal of Applied Physics. 135 (2024) 23 - p. , 2024
Link:
https://doi.org/10.1063/..
?
2
EUV Resist Chemical Analysis by Soft X-ray Absorption Spect..:
Emura, Kazuya
;
Watanabe, Takeo
;
Yamaguchi, Masato
...
Journal of Photopolymer Science and Technology. 27 (2014) 5 - p. 631-638 , 2014
Link:
https://doi.org/10.2494/..
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