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IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science ,
6
Study of plasma chemistry in plasma doping processes:
, In:
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IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science ,
7
Hydrodynamic and analytical models for plasma immersion ion..:
, In:
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IEEE Conference Record - Abstracts. 1996 IEEE International Conference on Plasma Science ,
8
Study of high efficient Plasma Immersion Ion Implantation h..:
, In:
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International Conference on Plasma Science (papers in summary form only received) ,
9