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SiYeul Yoon
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Detecting buried voids in copper interconnect:

, In: 2013 e-Manufacturing & Design Collaboration Symposium (eMDC),
Liao, Hsiang-Chou ; SiYeul Yoon ; Moreau, Olivier... - p. 1-4 , 2013
Link: https://doi.org/10.1109/..
 
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Dry-Etching Characteristics of Attenuated Phase-Shifting Ma..:

Jeong, Soo Hong ; Choi, Se-Jong ; Cha, Han-Sun...
Japanese Journal of Applied Physics.  41 (2002)  Part 1, No. 8 - p. 5419-5423 , 2002
Link: https://doi.org/10.1143/..
 
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