Singh, Navab
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3

Sub-0.5 μm Pitch Scaling of W2W Cu/Dielectric Hybrid Bondin:

, In: 2024 IEEE 74th Electronic Components and Technology Conference (ECTC),
 
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4

Low Thermal Budget Fine-pitch Cu/Dielectric Hybrid Bonding ..:

, In: 2024 IEEE 74th Electronic Components and Technology Conference (ECTC),
 
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5

Cu/Dielectric hybrid bonding among Glass and Si:

, In: 2024 IEEE 74th Electronic Components and Technology Conference (ECTC),
 
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6

Defect evolution during through-silicon via copper electrop..:

, In: 2023 IEEE 25th Electronics Packaging Technology Conference (EPTC),
Van Nhat Anh, Tran ; Venkataraman, Nandini ; Tao, Meng... - p. 1059-1062 , 2023
 
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7

Alignment through thick Si layer for high resolution patter..:

, In: 2023 IEEE 73rd Electronic Components and Technology Conference (ECTC),
Sundaram, Arvind ; Tew, Chin Khang ; Tan, Guo Wei... - p. 1150-1155 , 2023
 
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8

CMOS-Compatible Fine Pitch Al-Al Bonding:

, In: 2023 IEEE 73rd Electronic Components and Technology Conference (ECTC),
 
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9

Patterning on reflective (Al) surface using auto alignment ..:

, In: 2023 IEEE 25th Electronics Packaging Technology Conference (EPTC),
 
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10

Study of Cu Pad Expansion with Surrounding Dielectrics for ..:

, In: 2023 IEEE 25th Electronics Packaging Technology Conference (EPTC),
Cheemalamarri, Hemanth Kumar ; Lir, Ji ; Lee, Wen.. - p. 493-497 , 2023
 
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11

Cu and barrier CMP process development with fine 1μm Cu bon..:

, In: 2023 IEEE 25th Electronics Packaging Technology Conference (EPTC),
 
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14

Ultrathin New Dielectric Interlayer Layer - Enhancer for TE..:

, In: 2023 IEEE 25th Electronics Packaging Technology Conference (EPTC),
 
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15

Doping-selective etching of silicon for wafer thinning in t..:

, In: 2023 IEEE 73rd Electronic Components and Technology Conference (ECTC),
 
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