Tanahashi, Katsuto
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2

Stencil-masked phosphorus-implanted silicon for solar cell ..:

Tanahashi, Katsuto ; Moriya, Masaaki ; Shirasawa, Katsuhiko.
Materials Science in Semiconductor Processing.  124 (2021)  - p. 105589 , 2021
 
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3

The impact of silicon brick polishing on thin (120 μm) sili..:

Sekhar, Halubai ; Fukuda, Tetsuo ; Tanahashi, Katsuto.
Materials Science in Semiconductor Processing.  105 (2020)  - p. 104751 , 2020
 
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4

Mechanical strength problem of thin silicon wafers (120 and..:

Sekhar, Halubai ; Fukuda, Tetsuo ; Tanahashi, Katsuto...
Materials Science in Semiconductor Processing.  119 (2020)  - p. 105209 , 2020
 
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5

Effect of Oxygen Precipitation in Silicon Wafer on Electric..:

Tanahashi, Katsuto ; Tachibana, Tomihisa ; Sueoka, Koji...
ECS Journal of Solid State Science and Technology.  8 (2019)  10 - p. P596-P601 , 2019
 
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8

The impact of damage etching on fracture strength of diamon..:

Sekhar, Halubai ; Fukuda, Tetsuo ; Kida, Yasuhiro..
Japanese Journal of Applied Physics.  57 (2018)  12 - p. 126501 , 2018
 
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9

The impact of subsurface damage on the fracture strength of..:

Sekhar, Halubai ; Fukuda, Tetsuo ; Tanahashi, Katsuto...
Japanese Journal of Applied Physics.  57 (2018)  8S3 - p. 08RB08 , 2018
 
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10

The impact of saw mark direction on the fracture strength o..:

Sekhar, Halubai ; Fukuda, Tetsuo ; Tanahashi, Katsuto...
Japanese Journal of Applied Physics.  57 (2018)  9 - p. 095501 , 2018
 
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11

Quality of n-Type Czochralski Silicon Crystals for Solar Ce..:

Fukuda, Tetsuo ; Horioka, Yukichi ; Kariya, Nobumasa..
ECS Journal of Solid State Science and Technology.  7 (2018)  10 - p. P562-P566 , 2018
 
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