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2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) ,
1
Piezoelectrically Actuated Micromirror Using Heavy Frame Su..:
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2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) ,
2
Resonant Piezoelectric Varifocal Mirror with on-Chip Integr..:
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2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) ,
10