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2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) ,
4
First demonstration of Two Metal Level Semi-damascene Inter..:
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2022 International Electron Devices Meeting (IEDM) ,
5
Semi-damascene Integration of a 2-layer MOL VHV Scaling Boo..:
, In:
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2021 IEEE International Electron Devices Meeting (IEDM) ,
11