Tiggelaar, Roald M.
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3

3d Self-Aligned Fabrication of Suspended Nanowires by Cryst..:

, In: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS),
 
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13

Massive Parallel NEMS Flow Restriction Fabricated Using Sel..:

, In: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS),
 
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