Tilke, A.
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2

TaN metal gate damage during high-k (Al2O3) high-temperatur..:

Paul, J. ; Beyer, V. ; Michalowski, P....
Microelectronic Engineering.  86 (2009)  4-6 - p. 949-952 , 2009
 
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3

Erratum: "X-ray analysis of temperature induced defect stru..:

Sztucki, M. ; Metzger, T. H. ; Kegel, I....
Journal of Applied Physics.  94 (2003)  10 - p. 7000-7000 , 2003
 
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4

Single-electron effects in highly doped polysilicon nanowir..:

Tilke, A ; Blick, R.H ; Lorenz, H.
Physica E: Low-dimensional Systems and Nanostructures.  15 (2002)  2 - p. 60-64 , 2002
 
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5

X-ray analysis of temperature induced defect structures in ..:

Sztucki, M. ; Metzger, T. H. ; Kegel, I....
Journal of Applied Physics.  92 (2002)  7 - p. 3694-3703 , 2002
 
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6

Coulomb blockade in silicon nanostructures:

Tilke, A
Progress in Quantum Electronics.  25 (2001)  3 - p. 97-138 , 2001
 
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7

Single-electron tunneling in highly doped silicon nanowires..:

Tilke, A. ; Blick, R. H. ; Lorenz, H..
Journal of Applied Physics.  89 (2001)  12 - p. 8159-8162 , 2001
 
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9

Fabrication and integration possibilities of ultrasmall qua..:

Tilke, A. ; Blick, R. H. ; Lorenz, H.
Journal of Applied Physics.  90 (2001)  2 - p. 942-946 , 2001
 
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10

Stable integration of isolated cell membrane patches in a n..:

Fertig, N. ; Tilke, A. ; Blick, R. H....
Applied Physics Letters.  77 (2000)  8 - p. 1218-1220 , 2000
 
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12

Silicon-based nanoelectronics and nanoelectromechanics:

Tilke, A. ; Erbe, A. ; Pescini, L....
Superlattices and Microstructures.  27 (2000)  5-6 - p. 597-601 , 2000
 
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13

Nanomechanical resonators operating as charge detectors in ..:

Krömmer, H ; Erbe, A ; Tilke, A..
Europhysics Letters (EPL).  50 (2000)  1 - p. 101-106 , 2000
 
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14

Coulomb blockade in quasimetallic silicon-on-insulator nano..:

Tilke, A. ; Blick, R. H. ; Lorenz, H...
Applied Physics Letters.  75 (1999)  23 - p. 3704-3706 , 1999
 
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15

Frequency- and spin-dependent absorption of surface-acousti..:

Tilke, A. ; Rocke, C. ; Wixforth, A.
Physica E: Low-dimensional Systems and Nanostructures.  5 (1999)  1-2 - p. 41-44 , 1999
 
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