I agree that this site is using cookies. You can find further informations
here
.
X
Login
My folder (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
Show Desktop-Version
Toggle navigation
Toriumi, Minoru
72
results:
Search for persons
X
Format
Online (72)
Mediatypes
Articles (Online) (69)
Bookchapter (Online) (1)
OpenAccess-fulltext (2)
Languages
english (62)
german (3)
Sorted by: Relevance
Sorted by: Year
?
1
Wavelength Dependence of Poly(p-hydroxystyrene) Ablation by..:
Toriumi, Minoru
;
Kawasaki, Takayasu
;
Araki, Mitsunori
..
Journal of Photopolymer Science and Technology. 32 (2019) 2 - p. 189-193 , 2019
Link:
https://doi.org/10.2494/..
?
2
Distributions of hafnia and titania cores in EUV metal resi..:
Toriumi, Minoru
;
Sato, Yuta
;
Koshino, Masanori
..
Applied Physics Express. 9 (2016) 11 - p. 111801 , 2016
Link:
https://doi.org/10.7567/..
?
3
Metal resist for extreme ultraviolet lithography characteri..:
Toriumi, Minoru
;
Sato, Yuta
;
Koshino, Masanori
..
Applied Physics Express. 9 (2016) 3 - p. 031601 , 2016
Link:
https://doi.org/10.7567/..
?
4
Inhomogeneity of photoacid generators in methacrylate-type ..:
Toriumi, Minoru
;
Itani, Toshiro
Japanese Journal of Applied Physics. 54 (2015) 6S1 - p. 06FE02 , 2015
Link:
https://doi.org/10.7567/..
?
5
Inhomogeneity of PAGs in Resist Film studied by Molecular D..:
Toriumi, Minoru
;
Itani, Toshiro
Journal of Photopolymer Science and Technology. 27 (2014) 5 - p. 617-622 , 2014
Link:
https://doi.org/10.2494/..
?
6
Measurements of binary diffusion coefficients for metal com..:
Toriumi, Minoru
;
Katooka, Ryohei
;
Yui, Kazuko
...
Fluid Phase Equilibria. 297 (2010) 1 - p. 62-66 , 2010
Link:
https://doi.org/10.1016/..
?
7
A Study of Molecular Orientation Effect in Photoresist Film:
Kaneyama, Koji
;
Toriumi, Minoru
;
Itani, Toshiro
Japanese Journal of Applied Physics. 47 (2008) 6S - p. 4936 , 2008
Link:
https://doi.org/10.1143/..
?
8
Reaction Mechanism of Extreme Ultraviolet Resists:
Toriumi, Minoru
;
Kaneyama, Koji
;
Itani, Toshiro
Japanese Journal of Applied Physics. 47 (2008) 6S - p. 4918 , 2008
Link:
https://doi.org/10.1143/..
?
9
Feasibility Study of Chemically Amplified Extreme Ultraviol..:
Kozawa, Takahiro
;
Tagawa, Seiichi
;
Santillan, Julius Joseph
..
Japanese Journal of Applied Physics. 47 (2008) 6R - p. 4465 , 2008
Link:
https://doi.org/10.1143/..
?
10
Effects of Rate Constant for Deprotection on Latent Image F..:
Kozawa, Takahiro
;
Tagawa, Seiichi
;
Santillan, Julius Joseph
..
Japanese Journal of Applied Physics. 47 (2008) 6S - p. 4926 , 2008
Link:
https://doi.org/10.1143/..
?
11
Analysis of Outgassing from EUV Resists:
Kobayashi, Shinji
;
Toriumi, Minoru
;
Santillan, Julious Joseph
Journal of Photopolymer Science and Technology. 20 (2007) 3 - p. 445-451 , 2007
Link:
https://doi.org/10.2494/..
?
12
Quartz-Crystal-Microbalance Study for Dissolution of Resist..:
Toriumi, Minoru
Journal of Photopolymer Science and Technology. 20 (2007) 4 - p. 585-590 , 2007
Link:
https://doi.org/10.2494/..
?
13
Dissolution behavior of tetrafluoroethylene-based fluoropol..:
Ishikawa, Takuji
;
Kodani, Tesuhiro
;
Yoshida, Tomohiro
...
Journal of Fluorine Chemistry. 125 (2004) 11 - p. 1791-1799 , 2004
Link:
https://doi.org/10.1016/..
?
14
A Nonaqueous Potentiometric Titration Study of the Dissocia..:
Nakatani, Kiyoharu
;
Yamashita, Jun
;
Sekine, Tomomi
..
Analytical Sciences. 19 (2003) 5 - p. 775-777 , 2003
Link:
https://doi.org/10.2116/..
?
15
The Resist Property of Fluoropolymer for 157-nm Lithography:
Ishikawa, Seiichi
;
Toriumi, Minoru
;
Miyoshi, Seiro
...
Journal of Photopolymer Science and Technology. 14 (2001) 4 - p. 595-601 , 2001
Link:
https://doi.org/10.2494/..
1-15