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Toshiharu Minamikawa
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1
Microwave-modulated nonresonant microwave absorption in YBa..:
Akiharu Morimoto
;
Hiromichi Kawasaki
;
Toshiharu Minamikawa
.
Physica C: Superconductivity. 268 (1996) 1-2 - p. 53-60 , 1996
Link:
https://doi.org/10.1016/..
?
2
Influence of shadow on shunt-type potential-induced degrada..:
Masuda, Atsushi
;
Tachibana, Yasushi
;
Toyoda, Takeshi
...
Japanese Journal of Applied Physics. 59 (2020) SG - p. SGGF04 , 2020
Link:
https://doi.org/10.7567/..
?
3
Influence of hygrothermal stress on potential-induced degra..:
Masuda, Atsushi
;
Yamamoto, Chizuko
;
Hara, Yukiko
...
Japanese Journal of Applied Physics. 59 (2020) 7 - p. 076503 , 2020
Link:
https://doi.org/10.35848..
?
4
Cat-CVD SiN passivation films for OLEDs and packaging:
Heya, Akira
;
Minamikawa, Toshiharu
;
Niki, Toshikazu
...
Thin Solid Films. 516 (2008) 5 - p. 553-557 , 2008
Link:
https://doi.org/10.1016/..
?
5
Coverage properties of SiNx films prepared by catalytic che..:
Heya, Akira
;
Minamikawa, Toshiharu
;
Niki, Toshikazu
...
Thin Solid Films. 516 (2008) 10 - p. 3000-3004 , 2008
Link:
https://doi.org/10.1016/..
?
6
High-rate deposition of SiNx films over 100 nm/min by Cat-C..:
Osono, Tetsuo
;
Heya, Akira
;
Niki, Toshikazu
...
Thin Solid Films. 501 (2006) 1-2 - p. 55-57 , 2006
Link:
https://doi.org/10.1016/..
?
7
Formation of highly moisture-resistive SiNx films on Si sub..:
Minamikawa, Toshiharu
;
Heya, Akira
;
Niki, Toshikazu
...
Thin Solid Films. 501 (2006) 1-2 - p. 154-156 , 2006
Link:
https://doi.org/10.1016/..
?
8
Improvement of Deposition Rate by Sandblasting of Tungsten ..:
Heya, Akira
;
Niki, Toshikazu
;
Takano, Masahiro
...
Japanese Journal of Applied Physics. 44 (2005) 4R - p. 1943 , 2005
Link:
https://doi.org/10.1143/..
?
9
Preparation of Low-Stress SiNx Films by Catalytic Chemical ..:
Takano, Masahiro
;
Niki, Toshikazu
;
Heya, Akira
...
Japanese Journal of Applied Physics. 44 (2005) 6R - p. 4098 , 2005
Link:
https://doi.org/10.1143/..
?
10
Moisture-Resistive Properties of SiNx Films Prepared by Cat..:
Heya, Akira
;
Niki, Toshikazu
;
Takano, Masahiro
...
Japanese Journal of Applied Physics. 44 (2005) 4R - p. 1923 , 2005
Link:
https://doi.org/10.1143/..
?
11
Highly Moisture-Resistive SiNxFilms Prepared by Catalytic C..:
Heya, Akira
;
Niki, Toshikazu
;
Yonezawa, Yasuto
...
Japanese Journal of Applied Physics. 43 (2004) 10B - p. L1362-L1364 , 2004
Link:
https://doi.org/10.1143/..
?
12
Effect of Atomic Hydrogen on Preparation of Highly Moisture..:
Heya, Akira
;
Niki, Toshikazu
;
Takano, Masahiro
...
Japanese Journal of Applied Physics. 43 (2004) 12A - p. L1546-L1548 , 2004
Link:
https://doi.org/10.1143/..
?
13
Oxidation process in pulsed laser ablation of Si with vario..:
Masuda, Atsushi
;
Usui, Satoshi
;
Yamanaka, Yasuhiro
...
Thin Solid Films. 416 (2002) 1-2 - p. 106-113 , 2002
Link:
https://doi.org/10.1016/..
?
14
Preparation of SiNpassivation films for PZT ferroelectric c..:
Minamikawa, Toshiharu
;
Yonezawa, Yasuto
;
Heya, Akira
...
Thin Solid Films. 395 (2001) 1-2 - p. 284-287 , 2001
Link:
https://doi.org/10.1016/..
?
15
Preparation of Epitaxial Ge Film on Si by Pulsed Laser Abla..:
Yamada, Satoru
;
Oguri, Shinya
;
Morimoto, Akiharu
...
Japanese Journal of Applied Physics. 39 (2000) 4A - p. L278 , 2000
Link:
https://doi.org/10.1143/..
1-15