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Tsuda, Hirotaka
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1

Origin of plasma-induced surface roughening and ripple form..:

Hatsuse, Takumi ; Nakazaki, Nobuya ; Tsuda, Hirotaka...
Journal of Applied Physics.  124 (2018)  14 - p. , 2018
Link: https://doi.org/10.1063/..
 
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2

Metrology and inspection required for next generation litho..:

Asano, Masafumi ; Yoshikawa, Ryoji ; Hirano, Takashi...
Japanese Journal of Applied Physics.  56 (2017)  6S1 - p. 06GA01 , 2017
Link: https://doi.org/10.7567/..
 
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3

Erratum: Surface morphology evolution during plasma etching..:

Ono, Kouichi ; Nakazaki, Nobuya ; Tsuda, Hirotaka..
Journal of Physics D: Applied Physics.  50 (2017)  46 - p. 469601 , 2017
Link: https://doi.org/10.1088/..
 
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4

Surface morphology evolution during plasma etching of silic..:

Ono, Kouichi ; Nakazaki, Nobuya ; Tsuda, Hirotaka..
Journal of Physics D: Applied Physics.  50 (2017)  41 - p. 414001 , 2017
Link: https://doi.org/10.1088/..
 
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5

Surface smoothing during plasma etching of Si in Cl2:

Nakazaki, Nobuya ; Matsumoto, Haruka ; Tsuda, Hirotaka...
Applied Physics Letters.  109 (2016)  20 - p. , 2016
Link: https://doi.org/10.1063/..
 
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6

Two modes of surface roughening during plasma etching of si..:

Nakazaki, Nobuya ; Tsuda, Hirotaka ; Takao, Yoshinori..
Journal of Applied Physics.  116 (2014)  22 - p. , 2014
Link: https://doi.org/10.1063/..
 
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7

Modeling and Simulation of Nanoscale Surface Rippling durin..:

Tsuda, Hirotaka ; Takao, Yoshinori ; Eriguchi, Koji.
Japanese Journal of Applied Physics.  51 (2012)  8S1 - p. 08HC01 , 2012
Link: https://doi.org/10.7567/..
 
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8

Modeling and Simulation of Nanoscale Surface Rippling durin..:

Tsuda, Hirotaka ; Takao, Yoshinori ; Eriguchi, Koji.
Japanese Journal of Applied Physics.  51 (2012)  8S1 - p. 08HC01 , 2012
Link: https://doi.org/10.1143/..
 
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9

Molecular Dynamics Analysis of the Formation of Surface Rou..:

Tsuda, Hirotaka ; Takao, Yoshinori ; Eriguchi, Koji.
Japanese Journal of Applied Physics.  50 (2011)  8S2 - p. 08KB02 , 2011
Link: https://doi.org/10.1143/..
 
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10

Three-Dimensional Atomic-Scale Cellular Model and Feature P..:

Tsuda, Hirotaka ; Miyata, Hiroki ; Takao, Yoshinori..
Japanese Journal of Applied Physics.  50 (2011)  8S1 - p. 08JE06 , 2011
Link: https://doi.org/10.1143/..
 
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11

Molecular Dynamics Analysis of the Formation of Surface Rou..:

Tsuda, Hirotaka ; Takao, Yoshinori ; Eriguchi, Koji.
Japanese Journal of Applied Physics.  50 (2011)  8S2 - p. 08KB02 , 2011
Link: https://doi.org/10.7567/..
 
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12

Three-Dimensional Atomic-Scale Cellular Model and Feature P..:

Tsuda, Hirotaka ; Miyata, Hiroki ; Takao, Yoshinori..
Japanese Journal of Applied Physics.  50 (2011)  8S1 - p. 08JE06 , 2011
Link: https://doi.org/10.7567/..
 
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13

Atomic-scale cellular model and profile simulation of Si et..:

Tsuda, Hirotaka ; Mori, Masahito ; Takao, Yoshinori..
Thin Solid Films.  518 (2010)  13 - p. 3475-3480 , 2010
Link: https://doi.org/10.1016/..
 
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14

Atomic-Scale Cellular Model and Profile Simulation of Si Et..:

Tsuda, Hirotaka ; Mori, Masahito ; Takao, Yoshinori..
Japanese Journal of Applied Physics.  49 (2010)  8S1 - p. 08JE01 , 2010
Link: https://doi.org/10.1143/..
 
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15

Molecular-Dynamics-Based Profile Evolution Simulation for S..:

Tsuda, Hirotaka ; Eriguchi, Koji ; Ono, Kouichi.
Applied Physics Express.  2 (2009)  11 - p. 116501 , 2009
Link: https://doi.org/10.1143/..
 
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